Wafer defect analysis system
A defect analysis, wafer technology, applied in electrical components, semiconductor/solid-state device manufacturing, semiconductor/solid-state device testing/measurement, etc., can solve problems affecting wafers, wafers are not easy to find, error-prone, etc., to facilitate troubleshooting , saving manpower and time
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[0020] The problem to be solved by the present invention is to provide a wafer defect analysis system, which can analyze the scanning image of wafer defects, and highlight relevant defects, so as to facilitate timely investigation of the same defect at a specific position of the wafer.
[0021] In order to solve the above problems, a wafer defect analysis system of the present invention comprises:
[0022] The wafer defect scanning library is used to store the defect scanning diagrams of the wafers scanned by the wafer scanning machine within a set time, and the wafers include at least two batches of wafers;
[0023] A defect position acquisition unit, configured to obtain position information of defects based on the defect scanning diagram, and sort the position information, the position information includes an abscissa and a ordinate;
[0024] a defect position matching unit, configured to match the position information of a defect in the defect scan map of a wafer with the ...
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