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A method for testing the refractive index of solar cell anti-reflection film

A technology of solar cells and anti-reflection coatings, applied in the field of solar energy, can solve the problems that ellipsometers cannot measure accurately, the surface structure of anti-reflection coatings is sensitive, and the physical model of ellipsometers is limited. The method is simple and easy, and the measurement results are accurate and reliable.

Active Publication Date: 2016-06-15
盐城阿特斯阳光能源科技有限公司 +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the existing ellipsometer test has the following problems: (1) The ellipsometer is sensitive to the surface structure of the anti-reflection coating, and the value measured on the polished sheet is usually more accurate, followed by the value measured on the micron suede surface, and the nanometer The value measured on the suede surface is generally inaccurate; (2) the physical model in the existing ellipsometer is limited, and the calculation error of the system between different models is relatively large; the ellipsometer commonly used in laboratories and production in the industry There are only two models of silicon nitride and silicon oxide. With the development of thin film technology, the types and structures of thin film materials are becoming more and more diverse. The existing ellipsometer obviously cannot perform accurate measurements.

Method used

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  • A method for testing the refractive index of solar cell anti-reflection film
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  • A method for testing the refractive index of solar cell anti-reflection film

Examples

Experimental program
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Effect test

Embodiment 1

[0026] see Figure 1~2 Shown, a kind of test method of solar cell anti-reflection film refractive index comprises the steps:

[0027] (1) Use a reflectivity tester to measure the refractive index of the anti-reflection film of the solar cell to obtain the reflectivity curve, and take the wavelength corresponding to the lowest point on the reflectivity curve, which is recorded as λ 0 ; see figure 2 , using the reflectance tester D8 to measure the wavelength λ at the lowest reflectance of the sample 0 =735nm;

[0028] (2) adopt scanning electron microscope to detect the thickness of the antireflection film at the place of measuring solar cell antireflection film refractive index in the described step (1), get the average value, be denoted as d; See figure 1 , using a scanning electron microscope to measure the cross-section of the sample, and determine its thickness d=91.3nm;

[0029] (3) Substitute the above resin into the formula n=λ 0 / (4*d), you can get the refractive ...

Embodiment 2

[0035] see Figure 3-4 Shown, a kind of test method of solar cell anti-reflection film refractive index comprises the steps:

[0036] (1) Use a reflectivity tester to measure the refractive index of the anti-reflection film of the solar cell to obtain the reflectivity curve, and take the wavelength corresponding to the lowest point on the reflectivity curve, which is recorded as λ 0 ; see Figure 4 , using the reflectance tester D8 to measure the wavelength λ at the lowest reflectance of the sample 0 =648nm;

[0037] (2) adopt scanning electron microscope to detect the thickness of the antireflection film at the place of measuring solar cell antireflection film refractive index in the described step (1), get the average value, be denoted as d; See image 3 , using a scanning electron microscope to measure the cross-section of the sample, and determine its thickness d=78.6nm;

[0038] (3) Substitute the above resin into the formula n=λ 0 / (4*d), you can get the refractive ...

Embodiment 3

[0044] see Figure 5-6 Shown, a kind of test method of solar cell anti-reflection film refractive index comprises the steps:

[0045] (1) Use a reflectivity tester to measure the refractive index of the anti-reflection film of the solar cell to obtain the reflectivity curve, and take the wavelength corresponding to the lowest point on the reflectivity curve, which is recorded as λ 0 ; see Figure 6 , using the reflectance tester D8 to measure the wavelength λ at the lowest reflectance of the sample 0 =728nm;

[0046] (2) adopt scanning electron microscope to detect the thickness of the antireflection film at the place of measuring solar cell antireflection film refractive index in the described step (1), get the average value, be denoted as d; See Figure 5 , using a scanning electron microscope to measure the cross-section of the sample to determine its thickness d=119nm;

[0047] (3) Substitute the above resin into the formula n=λ 0 / (4*d), you can get the refractive in...

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Abstract

The invention discloses a method for measuring the refractive index of a solar cell anti-reflection film, comprising the following steps: (1) using a reflectivity tester to measure the refractive index of the solar cell anti-reflection film, obtaining a reflectivity curve, and taking a value on the reflectivity curve. The wavelength corresponding to the lowest point, denoted as λ 0 (2) adopt scanning electron microscope to detect the thickness of the antireflection film at the place of measuring the refractive index of the solar cell antireflection film in the step (1), take an average value, and be denoted as d; (3) substitute above-mentioned resin into formula n= λ 0 / (4*d), the refractive index of the antireflection film can be obtained. The invention has developed a new method for measuring the refractive index of the anti-reflection film of solar cells. It has been proved by experiments that the testing method of the invention can accurately measure the anti-reflection film grown on the surface of any textured structure, and the measurement results are accurate. reliable.

Description

technical field [0001] The invention relates to a method for testing the refractive index of an anti-reflection film of a solar cell, belonging to the technical field of solar energy. Background technique [0002] Currently, solar cells are the dominant product in the photovoltaic market. In the manufacturing history of solar cells, in order to improve the conversion efficiency of solar cells, the technology of depositing anti-reflection films on the surface of silicon wafers has become one of the main means. Commonly used anti-reflection coatings include silicon nitride, silicon oxide, silicon carbide, titanium oxide, and tantalum oxide; the existing technology uses one of these films or the superposition of several films; this can greatly reduce the incidence of incident light. Reflection, thereby improving the utilization of light by solar cells. [0003] In the prior art, in order to control and evaluate the quality of the anti-reflection film, two parameters, film thi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/41
Inventor 邹帅王栩生章灵军
Owner 盐城阿特斯阳光能源科技有限公司
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