Novel three-position rotating workbench with PLC
A rotary table and controller technology, applied in the direction of using feedback control, etc., can solve problems such as difficulty in ensuring high precision and scarcity of operators, and achieve the effects of light weight, small size, strong anti-interference ability and load capacity
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[0016] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments.
[0017] refer to figure 1 As shown, a new three-station rotary table with a PLC controller includes a rotary table 1, a station seat 2, a wafer holder 3, a PLC controller 4 and peripheral equipment 5. The rotary table 1 The upper surface is circular, and the station seat 2 is evenly distributed on the upper surface of the rotary table 1 at an angle of 120°, and a wafer carrier 3 is coaxially installed above the station seat 2, and the An encoder 6 is provided at the central rotating shaft of the rotary table 1 , and the encoder 6 is connected to the PLC controller 4 through a cable 7 .
[0018] Further, the station seat 2 includes the No. 1 station seat 21, the No. 2 station seat 22 and the No. 3 station seat 23, and is evenly distributed on the surface radial line of the rotary table 1 at an angle of 120 degrees. superior.
[0019...
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