High temperature water circulation and flash evaporation integrated tank and system for producing polysilicon

Abstract

The invention provides a high-temperature water-circulation flash-evaporation integrated tank and a system for preparing polycrystalline silicon. The high-temperature water-circulation flash-evaporation integrated tank comprises a tank body, a high-temperature water inlet, a cooling water outlet, a flash-evaporation vapor outlet and a vapor condensed liquid inlet, wherein flash-evaporation space is limited in the tank body and used for carrying out flash-evaporation cooling on the high-temperature water in the flash-evaporation space; the high-temperature water inlet is formed in the tank body and suitable for being connected with a reduction furnace; the cooling water outlet is formed in the tank body and suitable for being connected with the reduction furnace; the flash-evaporation vapor outlet is formed in the tank body and is suitable for being connected with a rectification device; the vapor condensed liquid inlet is formed in the tank body and suitable for being connected with the rectification device. The high-temperature water-circulation and flash-evaporation integrated tank can be used for realizing the integrated treatment of high-temperature water circulation and flash evaporation.

Description

technical field [0001] The invention relates to the field of metallurgy, and more specifically, the invention relates to a high-temperature water circulation and flash evaporation integrated tank and a system for producing polysilicon. Background technique [0002] In the production of polysilicon, the silicon core is placed in advance in the CVD reduction furnace, and it is heated by a special electrical device. Polysilicon is deposited and grown on the surface of the silicon core heating element at ~1100°C. At the same time, according to the process regulations and equipment requirements, high-temperature water with a certain flow rate and temperature is passed into the bell jar jacket of the reduction furnace to radiate the silicon rods to the inner wall of the bell jar. The heat is taken away, so as to ensure the stable temperature of silicon rods and bell jars, and the stable growth of polysilicon. [0003] The traditional high-temperature water system of the reduction...

AI Technical Summary

Problems solved by technology

[0004] 1. The high-temperature water in the bell jacket of the reduction furnace is circulated through the air cooling system and the flash system. There are many parameters to be controlled, and it is not intuitive. It is difficult for ordinary operators to control. At the same time, the pressure drop is severe and the temperature and liquid level fluctuate relatively Large, unsatisfactory control effect;

[0005] 2. Adding a set of flash evaporation equipment to the original high-temperature water system requires a large investment, which is not conducive to the development of energy saving and consumption reduction

Images