System and method for aerating and plugging alkali metal steam chamber of mini type CPT atomic clock

Abstract

The invention relates to a system and a method for aerating and plugging an alkali metal steam chamber of a mini type CPT atomic clock. The system mainly comprises a buffer gas storing bottle, an alkali metal steam gas storing bottle, a vacuum chamber, an MEMS (micro-electromechanical systems) wafer supporting table, a vacuum pump and a laser plugging device. A manufacture method of an MEMS wafer of the alkali metal steam chamber comprises the following steps of: manufacturing an on-silicon alkali metal steam chamber on a silicon wafer, simultaneously forming an in-silicon vent groove in the silicon wafer by means of dry etching or wet etching, forming in-glass aerating holes in a glass material by means of mechanical holing or laser holing and the like, manufacturing on-glass aerating micro-channels on the glass material by means of the wet etching, and manufacturing the alkali metal steam chamber of the mini type CPT atomic clock by means of anodic bonding. The CO2 laser beam penetrates through an optical window of a vacuum chamber to melt alkali metal steam chamber chips on the MEMS wafer one by one to plug the glass aerating holes or aerating micro-channels. According to the system and the method provided by the invention, the alkali metal steam chamber of the mini type CPT atomic clock has the advantages that the alkali metal steam chamber is simply operated, impurities are hardly introduced, the alkali metal steam chamber is conveniently manufactured in batches, and the like.

Description

technical field [0001] The invention relates to the field of miniature CPT atomic clocks, in particular to a method and system for filling and sealing an alkali metal steam chamber of a miniature CPT atomic clock. Background technique [0002] Atomic clocks are currently the most accurate timekeeping tools, and play an important role in astronomy, aerospace, satellite navigation and positioning, punctuality and physical science. However, due to its huge size and high price, the further expansion of its application range is limited, and the miniaturization of atomic clocks will greatly expand its application range, which will have a profound impact on the fields of communication, electronics, aviation, aerospace, national defense, etc., and in The installation of atomic clocks in various measuring instruments will also make the measurements more accurate and reliable. Due to the existence of microwave resonators, the size of traditional atomic clocks is difficult to further ...

AI Technical Summary

Problems solved by technology

[0012] Aiming at the problems of high environmental requirements, frequency drift caused by the introduction of impurities, complicated operation, and difficulty in mass production in the current manufacturing method of the atomic clock alkali metal steam chamber, the present invention proposes a method for inflating and sealing the miniature CPT atomic clock alkali metal vapor chamber. and system, enabling the manufacture of atomic clock alkali metal vapor chambers to overcome the above-mentioned problems

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