Micro electromechanical resonator based on structural self-excited vibration principle

Abstract

The invention discloses a micro electromechanical resonator based on a structural self-excited vibration principle, which comprises an insulation support pedestal, a conducting micro beam, two direct current driving electrodes and a substrate, wherein the insulation support pedestal is neither connected with any electrode nor grounded, that is electric potential is floating; one end of the conducting micro beam is fixed on the insulation support pedestal; the other end of the conducting micro beam is horizontally overhung; the two direct current driving electrodes are placed on the two sides of the conducting micro beam; one of the direct current driving electrodes is connected into direct current positive voltage; the other direct current driving electrode is connected into direct current negative voltage; a certain distance is kept between the two direct current driving electrodes; and the insulation support pedestal and the direct current driving electrodes are fixed on the substrate. The micro electromechanical resonator abandons a complicated alternating current driving / detection circuit essential to the traditional resonator, and eliminates a short circuit risk arising from structure destabilization; a structure is simplified; and resonance amplitude is increased greatly.

Description

technical field [0001] The invention relates to a micro-electromechanical resonator structure driven by DC voltage based on the principle of self-excited vibration of microstructures in an electrostatic field, belonging to the fields of micro-electromechanical systems and micro-sensors / executors. Background technique [0002] According to different structural forms, electrostatically driven micro-electromechanical (MEMS) resonators include beam type, disc type, ring type, comb-shaped, thin-film type, etc. Taking the microbeam resonator (cantilever beam) as an example, explain its general working principle: apply a DC bias voltage on the conductive microbeam, apply an AC drive voltage on the driving electrode, due to the Coulomb force between the microbeam and the driving electrode, The microbeam vibrates under the action of the AC driving voltage. By setting the detection electrode and the feedback circuit near the microbeam, the frequency of the driving voltage can be contr...

AI Technical Summary

Problems solved by technology

Therefore, in order to avoid instability, the amplitude of traditional resonators is difficult to further increase, often only about 30% of the electrode spacing

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