Fourier spectrometer based on MEMS

Abstract

The invention discloses a Fourier spectrograph based on a micro electro mechanical system. The Fourier spectrograph based on the micro electro mechanical system comprises a first laser light source, a first alignment lens, a convergence lens and a sample basin, wherein laser light emitted by the first laser light source is aligned through the first alignment lens, radiates a sample in the sample basin after being converged through the convergence lens, and generates sample exciting light through reflection of the sample. The Fourier spectrograph based on the micro electro mechanical system further comprises a first reflector; after the sample exciting light is collected through the first reflector, the laser light and the sample exciting light are reflected through the first reflector and then radiate on the sample in the sample basin again, so as to generate the sample exciting light. The Fourier spectrograph based on the micro electro mechanical system is beneficial to collection of the sample exciting light, so that the frequency of radiating the sample is increased, and the intensity of the sample exciting light is improved.

Description

technical field [0001] The invention belongs to the technical field of spectrometers, and relates to a Fourier spectrometer based on a micro-electromechanical system. Background technique [0002] Spectroscopic instruments are powerful tools for analyzing the composition and structure of substances. They can be used for qualitative and quantitative analysis of samples. The requirements of online real-time monitoring and portability in the field and industry promote the development of miniaturization of spectroscopic instruments, and have a broad application space. However, the traditional Fourier transform spectrometer is bulky and expensive, which is not conducive to the popularization of products. [0003] In recent years, research on miniaturized spectrometers has progressed very rapidly. Most of the existing miniature spectrometers still use the principle of classical spectrometers. Due to the size of the incident slit aperture and aperture, the luminous flux is limited...

AI Technical Summary

Problems solved by technology

This kind of spectrometer uses time modulation to realize the modulation of optical signals, and multiple localized interference fringes are sequentially formed at the receiving point of the detection system; the moving mirror as a mirror requires a high-precision drive system, and the repeatability and reliability of the system It is difficult to guarantee the performance and the real-time performance of the measurement is poor. The mechanism of this kind of spectrometer is relatively complicated and the volume is large.

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