Electro-optic modulator based on micro-ring Mach-Zehnder interferometer structure

Abstract

The invention discloses an electro-optic modulator based on a micro-ring Mach-Zehnder interferometer structure. The electro-optic modulator comprises an incident waveguide, a bending waveguide, the Mach-Zehnder interferometer structure and a traveling wave electrode, the incident waveguide is a straight waveguide and used for receiving incident light and outputting emergent light, a short distance is formed between the bending waveguide and the incident waveguide, the incident light passing through the incident waveguide is coupled into the bending waveguide, the emergent light passing through the bending waveguide is coupled into the incident waveguide and outputted, an input end of the Mach-Zehnder interferometer structure is connected with an input end of the bending waveguide, an output end of the Mach-Zehnder interferometer structure is connected with an output end of the bending waveguide to form a micro-ring resonant cavity, the Mach-Zehnder interferometer structure is used for increasing light loss of the micro-ring resonant cavity, and the traveling wave electrode is used for loading voltage to the Mach-Zehnder interferometer structure, so that the Mach-Zehnder interferometer structure is used for modulating the intensity of light inputted into the structure. The MZI (Mach-Zehnder interferometer) structure is added into a micro-ring uncoupled area, and the incident light is modulated by switching over a micro-ring critical coupling state and a noncritical coupling state.

Description

technical field [0001] The invention relates to the field of high-speed electro-optic modulation, in particular to an electro-optic modulator based on a microring-Mach-Zehnder interferometer (Ring-MZI) structure, which provides a way to realize low power consumption and small-size photon integration. Background technique [0002] With the development of integrated circuit technology, the size of devices is getting smaller and smaller, and the resulting power consumption, crosstalk and delay are becoming more and more serious. Pure electrical devices can no longer meet the needs of information development, especially in the field of interconnection. , Therefore, in 1984, it was proposed to use optical interconnection instead of electrical interconnection. Compared with electrical interconnection, optical interconnection has many advantages, such as low delay, large transmission throughput, no interference and low energy consumption. In the field of photonic interconnection, ...

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Problems solved by technology

Among the three carrier modulation methods, the carrier injection type has the highest modulation efficiency due to the large change in the carrier concentration, but the modulation speed is also the slowest; the carrier accumulation and carrier depletion are due to the carrier Concentration changes only in SiO 2 On both sides of the layer and the PN junction, the range of variation is small, so the modulation efficiency is relatively low, but the modulation speed is fast

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