Detection system and method for automatic adjustment of grey level

Abstract

Provided are a detection system and method for automatically adjusting grayscale. The detection system comprises a detection lens (1), wherein the detection lens (1) is configured to collect a mask alignment image (10) and a substrate alignment image (11) which are formed by images of a mask alignment mark (8) on a mask plate (6) and a substrate alignment mark (9) on a glass substrate (7); and an automatic filter device (4) arranged on an optical path of the detection lens (1) where the substrate alignment image (11) is formed, wherein the automatic filter device (4) comprises an automatic grayscale detecting module (12), a control module (14) and an optical filter (13). The detection system and method for automatically adjusting grayscale can automatically change the grayscale of the substrate alignment image (11), thereby improving the degree of automation of the detection system.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a detection system and method for automatically adjusting gray levels. Background technique [0002] Such as figure 1 As shown, at present, in the exposure process of the RGB film layer of the color filter of the liquid crystal panel, a four-point alignment method is often used to align the mask plate 6 and the glass substrate 7, that is, by aligning the mask plate 6 The alignment marks at the four corners and the alignment marks at the four corners of the glass substrate 7 are used to align the mask plate 6 and the glass substrate 7 , and only when the four points are aligned at the same time can the automatic exposure be performed. [0003] The above-mentioned alignment of each point is completed through a detection system, which includes a detection lens 1, a semi-transparent mirror 2 and a light source 3, and the light emitted by the light source 3 passes through the semi-t...

AI Technical Summary

Problems solved by technology

[0004] During the above-mentioned alignment process of the mask plate 6 and the glass substrate 7, if the grayscale of the substrate alignment image 11 in the four detection systems is inconsistent in a certain alignment process, the detection system will consider the mask plate 6 and the glass substrate 7 to be Without alignment, manual adjustment is required, resulting in low automation of the detection system and affecting production capacity

In the prior art, the photoresist is often applied to all the areas of the four substrate alignment marks 9 on the glass substrate 7 to ensure that the gray scale is consistent. It cannot be guaranteed that the area of ​​the alignment mark 9 of the substrate is completely coated, so the detection system of the prior art has a high alignment error rate and a low degree of automation

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