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Transmission electron microscope objective lens diaphragm

An electron microscope and objective lens technology, applied in circuits, discharge tubes, electrical components, etc., can solve the problems of reducing the signal-to-noise ratio and resolution of high-resolution images of transmission electron microscopes, and achieve full and full images, improve image resolution, and improve image quality. Effects of Noise Ratio and Resolution

Active Publication Date: 2013-07-10
SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
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Problems solved by technology

In summary, the participation of transmitted beams in imaging will reduce the signal-to-noise ratio and resolution of high-resolution TEM images

Method used

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  • Transmission electron microscope objective lens diaphragm
  • Transmission electron microscope objective lens diaphragm
  • Transmission electron microscope objective lens diaphragm

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Embodiment Construction

[0015] The specific implementation of the transmission electron microscope objective diaphragm provided by the present invention will be described in detail below in conjunction with the accompanying drawings.

[0016] attached image 3 Shown is a transmission electron microscope objective diaphragm manufactured by focused ion beam (FIB) nanofabrication technology, which is made of Mo or other alloys, including a diaphragm plate 31, a threaded rod 32 and a handle 33, three C-shaped openings 311, 312 and 313 are arranged successively on the axis of the aperture plate 31, and the outer diameter of the opening is 100-200 microns, to ensure the maximum width of the diffraction spectrum exceeding the rear focal plane of the transmission electron microscope; the inner diameter of the opening (the so-called inner diameter refers to the aperture The diameter of the plate head) can be varied from 10 nm to 100 µm to ensure a diameter larger than the transmission spot. The same aperture...

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Abstract

The invention provides a transmission electron microscope objective lens diaphragm which comprises a diaphragm plate, a threaded rod connected with the diaphragm plate and a handle connected with the threaded rod. The objective lens diaphragm is provided with a series of C-shaped openings along the axis of the diaphragm plate. The transmission electron microscopy objective lens diaphragm has the advantages that baffles in the centers of the C-shaped opening holes of the diaphragm can prevent transmission electron beams from participating in high-resolution imaging of a high transmission electron microscope, the signal to noise ratio and the resolution of images are improved, the series of the C-shaped diaphragm opening holes with different dimensions are formed in the diaphragm plate, through choosing of the diaphragm opening holes with the appropriate dimensions, diffraction electron beam signals participating in the high-resolution imaging can be screened and the images are optimized.

Description

technical field [0001] The invention relates to a design of a novel transmission electron microscope objective diaphragm and an imaging experiment method thereof, which are used to improve the signal-to-noise ratio and resolution of high-resolution images of a transmission electron microscope, and belong to the technical field of material structure analysis and detection. Background technique [0002] High-resolution transmission electron microscopy is like an electron microanalysis method for direct imaging of the periodic crystal structure inside the material, and its imaging process follows the "Abbe imaging principle". attached figure 1 Shown are the two stages of the TEM high-resolution imaging process. One is that when the parallel electron beam generated in the transmission electron microscope passes through the thin crystal, it is scattered by the periodic structure (crystal plane) inside the crystal, splits into multi-level diffraction beams, and forms a diffractio...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J37/09
Inventor 牛牧童吴东昌张锦平黄凯张燚董晓鸣曾雄辉徐科
Owner SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
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