An optical system for calibration of vacuum ultraviolet spectral parameters
A technology of vacuum ultraviolet light and optical system
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[0029] The following description will enable any person skilled in the art to utilize the present invention. The descriptions provided in the specific embodiments and applications are examples only. Various extensions and combinations of the embodiments described herein will be apparent to those skilled in the art, and the general principles defined herein may be applied to other embodiments and applications without departing from the spirit and scope of the invention . Thus, the present invention is not limited to the embodiments shown, but the present invention covers the widest scope consistent with the principles and features shown herein.
[0030] Figure 1a A schematic diagram of an optical system for calibrating vacuum ultraviolet spectral parameters according to an embodiment of the present invention is given.
[0031] It includes a housing 101 and a plurality of collimating lenses 102 .
[0032] A plurality of collimating lenses 102 are installed in the housing 101...
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