Optical system for calibrating vacuum ultraviolet spectral parameters

A vacuum ultraviolet light and optical system technology, applied in the field of optical system design, can solve the problems of low cost, high cost, complex optical system, etc., and achieve the effects of reducing aberration, improving system reliability, and simplifying the structure of the optical system

Active Publication Date: 2013-06-26
BEIJING ZHENXING METROLOGY & TEST INST
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Problems solved by technology

[0003] In order to solve the problem of complex optical system and high cost in the field of ultraviolet-vacuum ultraviolet in the prior art, an optical system for calibrating vacuum ultraviolet spectral parameters is proposed, and different lenses are used to process ultraviolet light sources of different bands. Simple structure

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  • Optical system for calibrating vacuum ultraviolet spectral parameters
  • Optical system for calibrating vacuum ultraviolet spectral parameters
  • Optical system for calibrating vacuum ultraviolet spectral parameters

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Embodiment Construction

[0029] The following description will enable any person skilled in the art to utilize the present invention. The descriptions provided in the specific embodiments and applications are examples only. Various extensions and combinations of the embodiments described herein will be apparent to those skilled in the art, and the general principles defined herein may be applied to other embodiments and applications without departing from the spirit and scope of the invention . Thus, the present invention is not limited to the embodiments shown, but the present invention covers the widest scope consistent with the principles and features shown herein.

[0030] Figure 1a A schematic diagram of an optical system for calibrating vacuum ultraviolet spectral parameters according to an embodiment of the present invention is given.

[0031] It includes a housing 101 and a plurality of collimating lenses 102 .

[0032] A plurality of collimating lenses 102 are installed in the housing 101...

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Abstract

The invention relates to the technical field of designs for optical systems, in particular to an optical system for calibrating vacuum ultraviolet spectral parameters. When the optical system is used for calibrating vacuum ultraviolet relative spectral response ratios of detectors, ultraviolet light with a specific wave band within a 110-400nm wave band range is turned into parallel light by specific collimating lenses of a plurality of collimating lenses, and the parallel light is transmitted to the detectors; and when the optical system is used for calibrating vacuum ultraviolet spectral irradiance of light, the ultraviolet light with a specific wave band within a 110-400nm wave band range is converged by specific converging lenses of a plurality of converging lenses after the ultraviolet light is transmitted through diffusers, the converged light is outputted to a standard detector, and the ultraviolet light with the specific wave band is equalized by the specific diffusers. The optical system in an embodiment of the invention has the advantages that seven lens materials, the wave band ranges and performance parameters of the optical system are reasonably matched with one another by a combined type design method, the cost is lowered, and the structure of the system is simplified.

Description

technical field [0001] The invention relates to the technical field of optical system design, in particular to an optical system for calibrating vacuum ultraviolet spectral parameters. Background technique [0002] In optical system design, according to the corresponding theory of optical design, the wider the wavelength range and the lower the lower limit of the wavelength band to the short-wave ultraviolet band, the more difficult the optical design will be. In the near, middle and far ultraviolet to extreme ultraviolet bands, the band range is wide and the wavelength is short. In this range, the types of optical materials become few, and the spectral refractive index is also very low; generally speaking, in order to design a relatively complete ultraviolet optical system, Especially for the vacuum ultraviolet optical system, the system must be complicated, and many lenses are used to correct aberrations to meet the system requirements. The result of this is that the stru...

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Application Information

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IPC IPC(8): G02B27/30G02B27/09G02B27/00
Inventor 孙广尉孙红胜王加朋张玉国任小婉魏建强宋春晖
Owner BEIJING ZHENXING METROLOGY & TEST INST
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