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Preparation method of optical film with low ultraviolet optical loss

A technology of optical thin film and ultraviolet light, which is applied in optics, optical components, ion implantation plating, etc., can solve the problems of unsolved ultraviolet optical loss of aluminum oxide film, achieve reduced ultraviolet optical loss, good time stability and environmental stability Sexuality and the effect of saving equipment cost

Inactive Publication Date: 2013-06-12
UNIV OF SHANGHAI FOR SCI & TECH
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Problems solved by technology

However, the post-coating annealing treatment technology is mainly used to improve the stability of the optical properties of the reflective film and reduce the absorption loss of titanium oxide and other oxide films with severe oxygen loss, and does not solve the problem of ultraviolet optical loss of aluminum oxide films.

Method used

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Embodiment Construction

[0029] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention will be further elaborated below.

[0030] The preparation method of an optical thin film with low ultraviolet optical loss, firstly, the substrate is ultrasonically cleaned in a mixed solution of petroleum ether and warm water, and then carefully scrubbed with petroleum ether; then the substrate is placed in a vacuum chamber and evaporated by electron beam heat method for coating, the deposition temperature is 300°C-350°C, and the working vacuum is 3.5×10 -3 Pa-7.5×10 -3 Pa, the residual gas is air. Finally, post-coating annealing technology is used to post-treat the deposited film, and the gas in the annealing furnace is air. The method of the invention can greatly reduce the ultraviolet optical loss of the aluminum oxide thin film, and has the characteristics of high efficiency, simple process and low cost. The...

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Abstract

The invention relates to an optical film and in particular relates to a preparation method of an optical film with low ultraviolet optical loss. The preparation method comprises the following steps of: ultrasonically cleaning a substrate in a mixed solution of petroleum ether and warm water; carefully scrubbing the substrate by the petroleum ether; placing the substrate in a vacuum chamber; coating a film by adopting an electron beam thermal evaporation method, wherein the deposition temperature is 300 DEG C to 350 DEG C, the working vacuum degree is 3.5*10<-3>Pa to 7.5*10<-3>Pa, and the residual gas is air. The preparation method disclosed by the invention can be used for greatly reducing the ultraviolet optical loss of an aluminum oxide film; moreover, the preparation method has the characteristics of high efficiency, simpleness in process and low cost.

Description

technical field [0001] The invention relates to an optical thin film, in particular to a preparation method of an aluminum oxide thin film. Background technique [0002] Due to the development of the semiconductor industry and the laser material processing industry, the demand for high-quality high-energy optical components used in the ultraviolet band, especially the deep ultraviolet-vacuum ultraviolet (DUV-VUV) band, has risen sharply. Most of these components are used after coating, so the optimization and improvement of the performance of ultraviolet band thin film components is facing new challenges. The shorter the wavelength, the fewer coating materials are available, especially high refractive index coating materials. In the DUV band or even in the band below 200nm, alumina material is widely used in multilayer dielectric reflective film as the most commonly used high refractive index material. The optical properties of aluminum oxide thin films strongly depend on ...

Claims

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Application Information

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IPC IPC(8): C23C14/30C23C14/08C23C14/02C23C14/58G02B1/10
Inventor 陶春先尚淑珍卢忠荣赵曼彤张大伟倪争技
Owner UNIV OF SHANGHAI FOR SCI & TECH
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