Confocal microscopy measuring device based on measured surface fluorescence excitation

Abstract

The invention provides a confocal microscopy measuring device based on measured surface fluorescence excitation, and belongs to the technical field of surface topography measurement. The confocal microscopy measuring device comprises a laser device, a collimation beam expander, a polarizing beam splitter, a quarter-wave plate, a detection objective lens, a tested part, a collection objective lens, a pinhole and a detector, wherein the collimation beam expander and the polarizing beam splitter are configured on a collineation light path of the laser device along the light propagation direction; the quarter-wave plate, the detection objective lens and the tested part are configured on the reflection light path of the polarizing beam splitter; the collection objective lens, the pinhole and the detector are configured on the transmission light path of the polarizing beam splitter; a narrow band filter is contained inside the detector; and the tested part is borne by a micrometric displacement objective table, and the surface of the tested part is coated with a film in a vacuum evaporating coating method. By means of the design that surface characteristics of the tested surface are changed through film coating, the fact that measurement light can return back to a detection system after being reflected by the tested surface is guaranteed, the difficult problems of detection of a large numerical aperture (NA) and high gradient surface are resolved, and the confocal microscopy measuring device is suitable for ultra precise measurement of three-dimensional shapes with large NA and high gradient spherical surfaces, aspheric surfaces and free-form surfaces.

Description

technical field [0001] The confocal microscopic measurement device based on the fluorescent excitation of the measured surface belongs to the field of surface topography measurement technology, and particularly relates to a three-dimensional microstructure, microstep, and microgroove line used in microstructured optical elements, microstructured mechanical elements, and integrated circuit elements. Ultra-precision measuring device for surface shape measurement of wide and large numerical aperture optical components. Background technique [0002] Confocal sensing technology is a three-dimensional optical microscopy technology suitable for micron and submicron scale measurement. Its core principle is to use the basic characteristics of the significant difference between the out-of-focus signal and the in-focus signal intensity of the optical microscope system. The detector collects sample information to realize the separation of out-of-focus and in-focus signals, so as to ove...

AI Technical Summary

Problems solved by technology

[0005] In order to solve the problem that it is difficult for the detection light to return to the detection system, so that the detection of high NA and high slope surfaces cannot be realized, the present invention discloses a confocal microscopic measurement device based on fluorescence excitation of the measured surface

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