High pressure resistant load leading-out end structure and sealing-in craft based on metal ceramic
A cermet, high pressure technology, used in metal processing equipment, manufacturing tools, welding equipment and other directions, can solve the problems of unfavorable pressure process stability, difficult to control the amount of brazing filler metal and weld metal distribution, etc. Power switching capability and product reliability, improving the withstand voltage level and the number of high-voltage load switching groups, and the effect of high-pressure sealing
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[0053] (1) Fix the bottom plate, insulator and lead-out rod through tooling, and place brazing material at the joint between the bottom plate, insulator and lead-out rod; in this example, Kovar alloy is used for the bottom plate, and 95 porcelain is used for ceramics: silver is used for the brazing material Copper 28 solder: solder amount: 0.12-0.18g / cm 2 .
[0054] (2) Put the workpiece processed in step (1) into the vacuum furnace, first start the mechanical vacuum pump, open the bypass valve, start the Roots pump after vacuuming for about 10 minutes, open the main valve to start the diffusion pump, and diffuse The pump works for 80-90 minutes. During this time, the temperature is raised at a heating rate of about 10°C. While vacuuming, the temperature is preheated to below 450°C. After the diffusion pump works, the vacuum degree reaches 10°C. -3 Above Pa, keep warm for 30 minutes.
[0055] (3) Continue to heat up at 15-20°C / min until 740°C, and keep warm for 20 minutes; a...
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