Magnetron sputtering reeling coater for large-area flexible substrate

Abstract

The invention relates to the technical field of high-vacuum continuous reeling coaters, and concretely discloses a magnetron sputtering reeling coater for a large-area flexible substrate. The coater comprises a circular vacuum chamber, a flexible substrate reeling system and magnetron sputtering sources, wherein the circular vacuum chamber is divided into an unreeling zone, a pretreatment zone, a rolling zone and a coating zone by separation plates; a cold air blast in the flexible substrate reeling system stretches into an inner ring wall in a semicircular coating zone, and the inner ring wall is matched with the outer wall of the cold air blast; a rolling mechanism guarantees a case that a substrate is unreeled, goes through the cold air blast and then enters substrate rolling; and the magnetron sputtering sources stretch into the coating zone in the circular vacuum chamber from a direction opposite to the flexible substrate reeling system in order to coat the substrate which goes through the cold air blast. The coater enables the coating of multilayer films to be once completed, and the wrinkling of plastic substrates to be difficult; and simultaneously the circular vacuum chamber is fixed, and the flexible substrate reeling system and the magnetron sputtering sources respectively stretch into or are dragged out from the vacuum chamber from two sides, so the operation and the maintenance of the coater are convenient.

Description

technical field [0001] The invention belongs to the technical field of high-vacuum continuous winding coating machines, and in particular relates to a large-area flexible substrate magnetron sputtering winding coating machine. Background technique [0002] High-vacuum continuous coating machines have always been dominated by thermal evaporation coating machines. Its main applications are aluminized film for food packaging, capacitor film, and industrial metal thin-plated protective film. In recent years, the thermal evaporation coating process for flexible substrates has new applications, including the coating of new functional films such as optical films, catalytic films, and high-resistance barrier films. The thermal evaporation continuous coating machine has the characteristics of high production efficiency, but the uniformity of the film layer is poor. , the structure is relatively simple. With the development of modern industrial technology, the demand for coating on ...

AI Technical Summary

Problems solved by technology

The magnetron sputtering roll-to-roll coating machine has achieved great development, but when the magnetron sputtering process is used to coat plastic films, due to its relatively large thermal load, it is easy to cause the film to wrinkle.

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