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Small active vibration control system based on piezoelectric ceramic and piezoelectric accelerometer

A piezoelectric accelerometer and active vibration control technology, applied in non-electric variable control, control/regulation system, mechanical oscillation control, etc., can solve the problems of small low-frequency gain, acceleration reduction, DC drift saturation, etc., and achieve wide control Bandwidth, simple structure, and easy-to-integrate effects

Active Publication Date: 2013-03-20
WUHAN INST OF PHYSICS & MATHEMATICS CHINESE ACADEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] If piezoelectric ceramics are used for vibration control, there are also the following two difficulties: First, although piezoelectric ceramics have good high-frequency characteristics, their resonance and the resonance of the mechanical structure will produce a large phase shift, which seriously affects the stability of the system. Secondly, because the piezoelectric ceramic is a kind of displacement generating device, the acceleration generated by it decreases sharply with the decrease of frequency (12dB / oct), resulting in a small low-frequency gain, which needs to be compensated by a large circuit gain, which directly The DC drift of the circuit part is serious or even saturated, and the system cannot work

Method used

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  • Small active vibration control system based on piezoelectric ceramic and piezoelectric accelerometer
  • Small active vibration control system based on piezoelectric ceramic and piezoelectric accelerometer
  • Small active vibration control system based on piezoelectric ceramic and piezoelectric accelerometer

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Embodiment Construction

[0071] The system is described in detail below in conjunction with the accompanying drawings and embodiments:

[0072] 1. Overall

[0073] like figure 1 , the system includes a micro-vibration source 00, a sensor 10, an acceleration module 20, a displacement module 30, a velocity module 40, a first adder 50, an amplification and filtering module 60, a second adder 70, a driving module 80 and piezoelectric ceramics ( actuator) 90;

[0074] The micro-vibration source 00 includes an aluminum bracket 01, an aluminum chassis 02, a steel ball 03, a steel ball sleeve 04 and a flat head stop 05;

[0075] The sensor 10 includes a piezoelectric accelerometer 11 and a strain gauge 12;

[0076] The acceleration module 20 is composed of a charge amplifier 21, a bias compensation circuit 22 and a reference voltage 23;

[0077] The displacement module 30 is composed of a preamplifier 31, a first integrator 32 and a differentiator 33;

[0078] The speed module 40 is composed of a second ...

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Abstract

The invention discloses a small active vibration control system based on piezoelectric ceramic and a piezoelectric accelerometer, and relates to the technical field of precision machineries and modern control. The system comprises a micro-vibration source (00), a sensor (10), an acceleration module (20), a displacement module (30), a speed module (40), a first summator (50), an amplifying and filtering module (60), a second summator (70), a driving module (80) and the piezoelectric ceramic. The small active vibration control system has the advantages of simple structure, small size and easiness in integration, and can obtain a wider control band width, wherein the control frequency can achieve 200 Hz or even higher; the electric damping is adopted to replace mechanical damping, so that the realization is simpler; and a displacement signal is adopted as low-frequency drift compensation instead of adopting a method of direct current feedback to execute direct current stability, so that enough low-frequency gain and phase margin are guaranteed, and the control band width and the suppression ratio are effectively improved.

Description

technical field [0001] The invention relates to the technical fields of precision machinery and modern control, in particular to a small active vibration control system based on piezoelectric ceramics and piezoelectric accelerometers; the system is a simple structure, small size, strong practicability and scalability The one-dimensional active vibration isolation system can be widely used in vibration-sensitive systems such as atomic force microscopy (AFM), laser interference and gravitational wave detection. Background technique [0002] With the wide application of precision measurement, high-resolution observation and laser technology, good vibration isolation technology and vibration isolation platform are urgently needed. In many precision measurement experiments such as high-precision optics, laser frequency stabilization, laser interference gravitational wave detection, etc., ground vibration or even micro-vibration caused by sound or airflow, even at 10 -5 g or less...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05D19/02
Inventor 沈辉王春陈李生李刘锋
Owner WUHAN INST OF PHYSICS & MATHEMATICS CHINESE ACADEMY OF SCI
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