Micro-particle weighing sensor of V-shaped folding cantilever beam structure

Abstract

The invention discloses a micro-particle weighing sensor of a V-shaped folding cantilever beam structure, belonging to the field of a precise particle mass detection sensor. A micro mass sensor comprises a fixed block, a V-shaped folding cantilever beam structure and a piezoelectric thin film, and is characterized in that the upper surface of the V-shaped folding cantilever beam connected to the fixed block is connected with the piezoelectric thin film, wherein the top or tops of a single or a plurality of V-shaped folding grooves which are arranged along the axis is or are used as a main detection point or main detection points; and the mass of a detected object is accurately calculated through data output of the piezoelectric thin film. The rigidity and the effective mass distribution state of the sensor are effectively changed through introduction of the V-shaped folding cantilever beam, so that the detection sensitivity of the sensor is greatly improved. Specific examples show that the sensitivity can be improved by 227 percent compared with the conventional sensor of the rectangular section cantilever beam structure. The micro mass sensor has the characteristics of simple structure, accuracy in positioning of the detected object, high sensitivity and the like, so that the sensor can be widely applied to detection of atoms, fine particles, environmental dust and microbial cells such as bacteria or viruses.

Description

technical field [0001] The invention relates to a microparticle weighing sensor with a V-shaped folded cantilever beam structure, which belongs to the field of precision particle quality detection sensors and is mainly used for atomic weighing, microparticle measurement, detection and identification of microbial cells such as environmental dust and bacteria or viruses . Background technique [0002] The piezoelectric resonant micromass sensor mainly detects the material composition by measuring the structural resonance frequency change caused by the mass of the material attached to the sensor surface. The basic principle can be expressed by the following formula, Δf i =-f i Δm / M e , where f i is the i-th resonant frequency of the sensor, M e is the equivalent mass of the cantilever beam, ?m is the added mass per unit area, ?f i Changes in the resonant frequency of the sensor for increasing mass µm. It can be seen from this that the resonant frequency f of the key elast...

AI Technical Summary

Problems solved by technology

The proposed micromass sensor has the characteristics of high sensitivity, accurate positioning and high measurement accuracy, which effectively solves the problem of large errors in single atom weighing, cell measurement and dust particle size measurement of traditional planar cantilever beam structure sensors.

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