Coating device

A technology of coating device and coating liquid, which is applied in the direction of spraying device, device for coating liquid on the surface, coating, etc., can solve the problem of maintaining constant flow rate of difficult coating liquid, and achieve simple structure and uniform coating Effect

Inactive Publication Date: 2013-03-06
DAINIPPON SCREEN MTG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] However, in the state where the plurality of nozzles of the coating head are connected to the coating liquid storage part through the flexible coating liquid supply tube, when the coating liquid is supplied to the nozzles that move back and forth rapidly, the coating liquid supply tube It is difficult to keep the flow rate of the coating liquid sprayed from the nozzle constant due to the deformation caused by the movement of the nozzle, the inertial force of the coating liquid in the coating liquid supply pipe, etc.

Method used

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Examples

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Embodiment Construction

[0029] Embodiments of the present invention will be described below based on the drawings. figure 1 is a top view of the coating device of the present invention, figure 2 is the main view.

[0030] This coating device is used to coat a coating liquid on a rectangular glass substrate 100 . Specifically, the coating device is used to coat a volatile solvent (in this embodiment, one of the aromatic organic solvents) on the glass substrate 100 for the organic EL display device of the active matrix drive method. species of 4-methylanisole) and a coating solution of an organic EL material as a light-emitting material.

[0031] This coating apparatus has a substrate moving mechanism 11 for moving a glass substrate 100 . Such as figure 2 As shown, this substrate moving mechanism 11 has a substrate holding part 10 that holds the glass substrate 100 from the back surface of the glass substrate 100 . The substrate holding unit 10 is supported by a base 13 that moves along a pair o...

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PUM

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Abstract

The present invention provides a coating device, being able to coat the coated liquid evenly by maintaining the flow of the coated liquid constantly even in the situation of delivering the coated liquid to the nozzle during reciprocating movement through a flexible coated fluid supply pipe.A pressure change absorption mechanism (70) has a pressure absorption part (71) and a flow suppression part (72); the pressure absorption part (71) is resin-made soft tube (73), through the coating fluid supply pipe (64) coating fluid pressure changes and produce elastic deformation to make coating liquid for volume change. In addition, the flow suppression part (72) is formed by resin-made hard tubes (74) which has smaller trottling hole thickness and has smaller inner diameter than the inner diameter of the coated fluid supply pipe (64) and the soft tube(73).

Description

technical field [0001] The present invention relates to a glass substrate for an organic EL display device, a glass substrate for a liquid crystal display device, a glass substrate for a PDP (Plasma Display Panel), a substrate for a solar cell, a substrate for electronic paper, or a mask for a semiconductor manufacturing device. Coating equipment for coating coating liquid on substrates such as mold substrates. Background technique [0002] For example, when manufacturing an active matrix organic EL display device using a polymer organic EL (Electro Luminescence) material, the glass substrate is sequentially subjected to the following steps: Forming a TFT (Thin Film Transistor: Thin Film Transistor) circuit The process of forming an ITO (Indium Tin Oxide: indium tin oxide) electrode as an anode; the process of forming a partition wall; the process of coating a fluid material containing a hole transport material; forming a hole transport by heat treatment The process of laye...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B05C11/10B05C9/00
CPCB05B12/00B05C5/02B05C9/00B05C11/10H10K50/00
Inventor 相良秀一高村幸宏伊藤隆介大宅宗明
Owner DAINIPPON SCREEN MTG CO LTD
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