Parallelism-adjustable micro-electro-mechanical system Fabry-Perot cavity wavelength tunable filter

Abstract

The invention discloses a parallelism-adjustable micro-electro-mechanical system Fabry-Perot cavity wavelength tunable filter. The surface of a micro-bridge part is used as an upper electrode of the Fabry-Perot cavity; a grating is located at the center of the surface of the micro-bridge part; the bottommost layer is used as a substrate; a plurality of lower electrodes are distributed below the micro-bridge part in symmetry and in parallel, and respectively fixed on two insulation layers; the two insulation layers cover on the substrate and are used for electrically insulating the plurality of the lower electrodes from the upper electrode; two rectangular holes are formed at two sides of the micro-bridge part; the front cavity surface is located at the lower surface of the bridge surface corresponding to the grating area; the rear cavity surface is located at the upper surface of the substrate which is located below the grating and between the two insulation layers as the rear cavity surface of the Fabry-Perot cavity; and different voltages are applied between the plurality of the lower electrodes and the upper electrode so as to form a complex electrostatic field, so that the movable cavity surface of the Fabry-Perot cavity can be adjusted in appearance while moving downwards, thereby adjusting the parallelism between the front cavity surface and the rear cavity surface of the Fabry-Perot cavity.

Description

technical field [0001] The invention relates to the technical field of micro-opto-electro-mechanical systems, in particular to a micro-electro-mechanical system Fabry-Perot cavity wavelength tunable filter suitable for optical fiber communication systems with adjustable parallelism. Background technique [0002] In the field of wavelength tunable filters, microelectromechanical systems (MEMS) wavelength tunable filters have the advantages of small size, low energy consumption, fast response speed, low driving voltage, and good compatibility with integrated circuits. Much favored. The Fabry-Perot cavity filter made based on micro-electro-mechanical system technology uses a micro-electro-mechanical drive device to apply a reverse bias voltage on the front and rear cavity surfaces of the Fabry-Perot cavity, using electrostatic force or The effect of thermal strain is to shrink or grow the cavity length, thereby continuously tuning the resonant wavelength of the filter. The ai...

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Problems solved by technology

Acta Optics Sinica, 2012, In Press reported that the author developed a new type of filter by combining the grating and the Fabry-Perot cavity, but when the Fabry-Perot cavity of the filter is deformed, the The distortion of the cavity surface morphology caused by the impact is adjusted, and the parallelism cannot be guaranteed

In addition, the filter also needs an additional top reflector, and factors such as the stress mismatch between the reflector and the support structure exacerbate the non-parallelism of the Fabry-Perot cavity when the filter is deformed, which limits the practicability of the filter

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