Chemical mechanical polishing (CMP) grinding pad finishing structure
A technology for grinding pads and dressing surfaces, which is applied to parts of grinding machine tools, grinding/polishing equipment, and abrasive surface adjustment devices, etc., can solve problems such as shortening the service life of grinding pads, and achieve the effect of simple structure and convenient production.
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[0020] The present invention will be explained in detail below in conjunction with the accompanying drawings.
[0021] like figure 2 A CMP polishing pad dressing structure of an embodiment of the present invention shown in , includes a polishing pad 1 and a dresser 2 . The dresser 2 includes a dressing surface 21 placed above the upper surface 11 of the polishing pad 1 . The upper surface of the polishing pad 1 can be dressed by the dressing surface 21 .
[0022] like figure 2 As shown in , the upper surface 11 of the polishing pad 1 is circular in shape, and several circular grooves 12 are provided on the upper surface 11 of the polishing pad 1 .
[0023] like image 3 As shown in , the trimming surface 21 of the trimmer 2 is provided with several strip-shaped abrasive belts 22 . and combine figure 1 and figure 2 , the width of the strip-shaped grinding belt 22 is less than or equal to the width of the circular groove 12 on the upper surface 11 of the grinding pad 1...
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Abstract
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