Cryopump control apparatus, cryopump system, and method for monitoring cryopump
A control device, cryopump technology, applied in pump control, pump, axial flow pump, etc., can solve problems such as cryopump failure, reduction of vacuum processing system operation rate, adverse effect of manufacturing plan, etc., to achieve the effect of monitoring deterioration
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[0030] First, the outline of the embodiment of the present invention will be described.
[0031] In order to effectively grasp the deterioration status of the cryopump, it is preferable to install a monitoring function or a self-diagnosis function in the cryopump system to monitor the operating state of the cryopump.
[0032] The inventor of the present invention thought that by monitoring the operation of the cryopump using regeneration processing performed as part of the normal operation of the cryopump, it is possible to monitor the deterioration status of the cryopump and accurately grasp the maintenance time.
[0033] figure 1 The regeneration process 1 and the startup process 2 of the cryopump according to the embodiment are shown.
[0034] Regeneration treatment 1 includes: heating treatment 3, gasification or liquefaction of gas accumulated in the cryopump; purification treatment, introduction of purification gas such as nitrogen (hereinafter also referred to as Is "purified g...
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