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Piezoresistive monolithic integrated four-beam tri-axial accelerometer

A monolithic integrated, axial acceleration technology, applied in multi-dimensional acceleration measurement, acceleration measurement using inertial force, etc., can solve the problems of low sensitivity, large inter-axis coupling, complex structure, etc., and achieve high sensitivity and small inter-axis coupling , small size effect

Inactive Publication Date: 2014-06-25
ZHONGBEI UNIV
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Problems solved by technology

[0003] The purpose of the present invention is to solve the problems of existing piezoresistive triaxial accelerometers with complex structure, low sensitivity and large inter-axis coupling, and to provide a piezoresistor with completely symmetrical distribution, high sensitivity and high inter-axis coupling Small piezoresistive monolithic integrated four-beam three-axis accelerometer

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Embodiment Construction

[0025] The present invention will be further described below in conjunction with accompanying drawing:

[0026] Such as Figure 1 to Figure 6As shown, a piezoresistive single-chip integrated four-beam three-axis accelerometer includes a support frame 1, an elastic cantilever beam 2, and a mass block 3 suspended at the center of the support frame 1 through two elastic cantilever beams. The four sides are respectively fixed to the supporting frame 1 by an elastic cantilever beam 2, the lower surface of the supporting frame 1 exceeds the lower surface of the mass block 3, and the lower surface of the supporting frame 1 is bonded with a glass base 4 by electrostatic bonding technology, Sixteen strain varistors R1, R2, R3, R4, R5, R6, R7, R8, R9, R10, R11, R12, R13, R14, R15, R16, the four strain varistors on each elastic cantilever 2 are symmetrically distributed in pairs at both ends of the elastic cantilever 2, and the two strain varistors at the same end The varistors are dis...

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Abstract

The invention relates to an acceleration transducer in the field of MEMS (Micro-Electro-Mechanical System) transducers, in particular to a piezoresistive monolithic integrated four-beam tri-axial accelerometer which is used for solving the problems of complicated structure, low sensitivity and large inter-axis coupling in the tradtional piezoresistive monolithic integrated tri-axial accelerometer. The accelerometer comprises four elastic cantilever beams, a mass block and a supporting frame, wherein four sides of the mass block are supported and suspended at the central position of the supporting frame through one elastic cantilever beam respectively, the lower surface of the supporting frame is bonded with a glass substrate through an electrostatic bonding technology, 16 piezoresistors with same resistance are symmetrically and uniformly distributed at two ends of each of the four elastic cantilever beams and are connected to form three Wheatstone bridges respectively to detect acceleration signals in three axes respectively. The accelerometer provided by the invention has the advantages of simple structure, high sensitivity, low inter-axis coupling, high reliability, low cost, easiness for integrated processing and wide application range.

Description

technical field [0001] The invention relates to an acceleration sensor in the field of MEMS sensors, in particular to a piezoresistive monolithic integrated four-beam three-axis acceleration sensor. Background technique [0002] Acceleration measurement is based on the measurement of the inertial force generated by the mass-sensitive acceleration of the test instrument. It is a fully autonomous inertial measurement. Accelerometers are widely used in biological, chemical and medical analysis, in aerospace, aviation, navigation inertial navigation systems and guidance systems for carrying weapons, in vibration tests, earthquake monitoring, blasting engineering, foundation measurement, geological and mineral surveys and other measurement fields. Applications. Common micro-accelerometer products are single-axis, while micro-inertial systems and some other applications often require three-axis accelerometers to detect acceleration vectors, which puts forward demands for the emer...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01P15/12G01P15/18
Inventor 张文栋何常德张国军薛晨阳熊继军刘俊张永平杜春晖
Owner ZHONGBEI UNIV
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