Spin coating device
A technology of spin coating agent and vacuum device, which is applied in the direction of surface coating liquid device, coating, photoplate making process coating equipment, etc., which can solve the problem of small specification range of processed products and difficulty in ensuring the consistency and thickness of film formation Improve the quality of the photosensitive film surface, reduce the number of foreign matter, and reduce the impact of problems such as poor uniformity
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[0040] The present invention embodies the structural features of the spin coating device of the present invention by describing the structure of the spin coating device in the following specific embodiments.
[0041] The content of the present invention will be described in further detail below in conjunction with the accompanying drawings. The same components are provided with the same reference numerals in the figures.
[0042] In the present invention, the workpiece spin-coated by the spin-coating device is a mold for manufacturing the light guide plate. In this specification, a mold with a thickness greater than 3mm is called a mold core or a mold core mold, and a mold with a thickness less than 3mm is called a thin-plate workpiece (STAMPER) or a thin-plate mold.
[0043]figure 1 is a schematic diagram of a spin coating device of a specific embodiment of the present invention installed on a stand. exist figure 1 Among them, the platform 1 is a basic component of the spi...
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