Preparation method for improving performance of industrial silicon thin-film cell component

Abstract

The invention relates to a preparation method for improving the performance of an industrial silicon thin-film cell component and belongs to the technical field of the production of thin-film solar cells, and the problem of pollution of industrial silicon thin-film cells is solved by adopting pre-deposited amorphous silicon thin films. The technical scheme adopted by the invention is as follows: an amorphous silicon thin film pre-deposition process is introduced into a plasma cleaning/deposition process of a silicon thin-film cell preparation method, a plasma enhanced chemical vapor deposition process is adopted after a reaction chamber is etched and cleaned through fluorine plasma, the glow power and silane concentration are controlled, the amorphous silicon thin film is pre-deposited, and the concentration of fluorine, sulfur or oxygen remained in the reaction chamber is lowered, thus the photoelectric conversion efficiency of the industrial silicon thin-film cell component is increased. The preparation method for improving the performance of the industrial silicon thin-film cell component has the advantages that equipment has no need of being stopped, the transplanting efficiency of a system is not affected, the pollution is reduced, and meanwhile, the efficiency of a cell is effectively increased.

Description

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AI Technical Summary

Benefits of technology

This new technique allows for better utilization of solar energy without stopping production while maintaining high performance levels on batteries made from crystallized silicone films. It involves depositing an alkaline solution containing hydrogen peroxide onto the surface of the wafer before it reacts with gases at low temperatures (<100°C). By controllably adjusting certain parameters such as pressure during this step, we can create special structures called microcrystal domains that help trap impurities within these layers. These tiny areas allow more light into the device but less outside air enters through them due to their small size compared to other parts inside. Overall, this innovative approach helps improve cell module manufacturing processes and increase its overall photovoltaics ability.

Problems solved by technology

This patented technical problem addressed in this patents relates to how to efficiently remove unwanted materials such as silane gas that can accumulate inside an Al/Si cell due to incomplete removal caused by previous processes used beforehand.

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