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Point target image mosaic-based image sensor pixel pitch measurement method

A technology of image sensor and pixel pitch, which is applied in the direction of measuring devices, instruments, optical devices, etc., can solve the problems of defocusing of measuring devices, and achieve the effect of improving repeatability, reducing errors, and small errors

Active Publication Date: 2014-12-24
哈尔滨工业大学高新技术开发总公司
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Problems solved by technology

[0041] The present invention aims at the problem that the above-mentioned existing measurement method is not suitable for measurement in a small field of view, and the existing measurement device has a problem of defocusing, and proposes a method for measuring the pixel pitch of an image sensor in the frequency domain, which can be used in a small field of view Improve repeatability of measurement results

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  • Point target image mosaic-based image sensor pixel pitch measurement method
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Embodiment Construction

[0065] The specific embodiments of the present invention will be described in further detail below in conjunction with the accompanying drawings.

[0066] figure 1 It is a schematic diagram of the structure of an image sensor pixel pitch measurement device based on point target image stitching; the device includes a point target 1, an optical system 2, an image sensor 3, a slider 4, and a first guide rail 5 perpendicular to the optical axis. 1 The image is imaged onto the surface of the image sensor 3 through the optical system 2; and, the device also includes a second guide rail 6 along the optical axis. The sliding block 4 carrying the point target 1 is installed on the first guide rail 5 and the second guide rail 6, sliding The movement of the block 4 on the first guide rail 5 is matched with the movement of the slider 4 on the second guide rail 6, so that the point target 1 is in-focus imaged onto the surface of the image sensor 3 at any field of view position; among them, the...

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Abstract

A point target image mosaic-based image sensor pixel pitch measurement method and a point target image mosaic-based image sensor pixel pitch measurement system belong to the field of length, width or thickness measurement in the field of measuring equipment characterized by the optical method. The method includes the following steps: a point target is located in different fields of view and imaged for two times, a linear image is constructed according to the two point target images, the frequency corresponding to the first minimum of a modulation transfer function value obtained by utilizing actual measurement is equal to the theoretical cutoff frequency within a frequency domain, and the pixel pitch of an image sensor is worked out. In the system, a slider carrying the point target is mounted on a first track and a second track, and the motion of the slider on the first track cooperates with the motion of the slider on the second track, so that the point target can be focused and imaged onto the surface of the image sensor at any position in the field of views. The adoption of the invention in the measurement of the pixel pitch of the image sensor can help to reduce the error between single measurement results, thus increasing the repeatability of the measurement results.

Description

Technical field [0001] Image sensor pixel pitch measurement method based on point target image stitching belongs to the field of measuring length, width or thickness in the field of measuring equipment characterized by the use of optical methods, and especially relates to a method based on two static point target image stitching in the frequency domain Method of measuring the pixel pitch of an image sensor. Background technique [0002] The pixel pitch of the image sensor is a very important technical indicator in the field of precision measurement. For example, a target with a known size is imaged through an optical system. According to the number of pixels of the image sensor occupied by the target image and the pixel pitch, the size of the target image can be known. Finally, the size of the target image and the target size are used as a quotient. The lateral magnification of the optical system can be calibrated; in addition, the frequency spectrum of an image is analyzed, and...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/14
Inventor 谭久彬赵烟桥刘俭
Owner 哈尔滨工业大学高新技术开发总公司
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