Single-mode large-power THz quantum cascade laser (QCL) and manufacturing technology thereof

Abstract

The invention provides a single-mode large-power THz quantum cascade laser (QCL) and a manufacturing technology thereof. The single-mode large-power THz QCL comprises a two-dimensional photonic crystal waveguide located on a center and a first order grating waveguide distributed around the two-dimensional photonic crystal waveguide. By using the single-mode large-power THz QCL of the invention, output power of the THz laser of the center area waveguide can be substantially increased; a single-mode narrow line width of the THz laser can be guaranteed; a working mode set by the laser is only fed back; a lateral high-order mode can be inhibited; a quality factor of a photonic crystal resonator can be increased simultaneously.

Description

technical field [0001] The invention belongs to the technical field of laser semiconductors, and relates to a terahertz quantum cascade laser, in particular to a single-mode high-power terahertz quantum cascade laser and a manufacturing process thereof. Background technique [0002] Terahertz (THz) quantum cascade laser (quantum cascade laser, QCL), as an important terahertz radiation source, has the advantages of small size, light weight, and easy integration, and is a research hotspot in the field of terahertz. The research of terahertz quantum cascade lasers mainly focuses on the two aspects of active region and waveguide, which require devices with high operating temperature, low threshold current density, high conversion efficiency, high output power, single-mode narrow spectral linewidth, and small far field divergence angle and other properties. [0003] The waveguide structures of terahertz quantum cascade lasers mainly include single-sided metal waveguides and doub...

AI Technical Summary

Problems solved by technology

The second-order grating can realize the surface radiation of the laser. For the surface-emitting terahertz quantum cascade laser with the second-order grating, the problem is that the beam divergence is not limited in the vertical direction of the grating arrangement and the output power is small.

The reflection of the end face of the surface emitting waveguide will affect the mode of the laser, and the large-area waveguide is easy to excite the transverse high-order mode. An effective solution is to make absorption edges around the waveguide to weaken the end face reflection and suppress the transverse high-order mode, but increase the absorption edge will make the quality factor of the photonic crystal waveguide resonator smaller

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