Single-mode large-power THz quantum cascade laser (QCL) and manufacturing technology thereof

A technology of quantum cascade and manufacturing technology, which is applied in nano-optics, the structure of optical waveguide semiconductors, nanotechnology, etc., can solve the problems of photonic crystal waveguide resonant cavity quality factor becomes smaller, output power is small, beam divergence is not limited, etc. , to achieve the effect of improving the quality factor, increasing the output power, and ensuring the single-mode narrow linewidth

Inactive Publication Date: 2012-07-11
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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Problems solved by technology

The second-order grating can realize the surface radiation of the laser. For the surface-emitting terahertz quantum cascade laser with the second-order grating, the problem is that the beam divergence is not limited in the vertical direction of the grating arrangement and the output power is small.
The reflection of the end face of the surface emitting waveguide will...

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  • Single-mode large-power THz quantum cascade laser (QCL) and manufacturing technology thereof
  • Single-mode large-power THz quantum cascade laser (QCL) and manufacturing technology thereof
  • Single-mode large-power THz quantum cascade laser (QCL) and manufacturing technology thereof

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Embodiment

[0039] This embodiment provides a single-mode high-power terahertz quantum cascade laser, such as Figure 1A , 1B , 2 and 3, the terahertz quantum cascade laser includes a two-dimensional photonic crystal waveguide in the center and first-order grating waveguides distributed around the two-dimensional photonic crystal waveguide. The structure of the two-dimensional photonic crystal waveguide is: from bottom to top in the vertical direction, there are heavily doped n-type GaAs substrate, lower metal layer, lower contact layer, active region, upper contact layer, and upper metal layer; The upper metal layer and the upper contact layer are etched with two-dimensional lattice holes. The structure of the first-order grating waveguide is: from bottom to top in the vertical direction, there are heavily doped n-type GaAs substrate, lower metal layer, lower contact layer, active region, upper contact layer, and upper metal layer; wherein the A first-order grating is etched on the uppe...

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Abstract

The invention provides a single-mode large-power THz quantum cascade laser (QCL) and a manufacturing technology thereof. The single-mode large-power THz QCL comprises a two-dimensional photonic crystal waveguide located on a center and a first order grating waveguide distributed around the two-dimensional photonic crystal waveguide. By using the single-mode large-power THz QCL of the invention, output power of the THz laser of the center area waveguide can be substantially increased; a single-mode narrow line width of the THz laser can be guaranteed; a working mode set by the laser is only fed back; a lateral high-order mode can be inhibited; a quality factor of a photonic crystal resonator can be increased simultaneously.

Description

technical field [0001] The invention belongs to the technical field of laser semiconductors, and relates to a terahertz quantum cascade laser, in particular to a single-mode high-power terahertz quantum cascade laser and a manufacturing process thereof. Background technique [0002] Terahertz (THz) quantum cascade laser (quantum cascade laser, QCL), as an important terahertz radiation source, has the advantages of small size, light weight, and easy integration, and is a research hotspot in the field of terahertz. The research of terahertz quantum cascade lasers mainly focuses on the two aspects of active region and waveguide, which require devices with high operating temperature, low threshold current density, high conversion efficiency, high output power, single-mode narrow spectral linewidth, and small far field divergence angle and other properties. [0003] The waveguide structures of terahertz quantum cascade lasers mainly include single-sided metal waveguides and doub...

Claims

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Application Information

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IPC IPC(8): H01S5/34H01S5/22B82Y20/00
Inventor 曹俊诚万文坚韩英军
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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