Novel MEMS (microelectromechanical systems) bionic acoustic vector sensor and manufacturing method thereof

Abstract

The invention discloses a novel MEMS bionic acoustic vector sensor structure, which belongs to the field of acoustics. Moveable comb teeth 6 are arranged on a left vibrating diaphragm 1 and a right vibrating diaphragm 2 of the novel MEMS bionic acoustic vector sensor structure, and form comb tooth pairs with fixed comb teeth 7 which are connected in an anchoring area 9. By adopting a comb tooth pair structure, the defect that the conventional structure cannot detect capacitance due to existence of reinforcing ribs is remedied, so that a vibrating amplitude curve can be detected by detecting the capacitance change, the amplitudes and damping of a first-order modal frequency and a second-order modal frequency can be sequentially computed, an acoustic pressure value is tested by a testing microphone beside an apparatus, and an incidence angle of sound wave is computed for positioning an acoustic source. The invention also discloses a manufacturing method for the novel MEMS bionic acoustic vector sensor structure. When an SOG technology is used for etching a fluid clearance on glass, the technology is simple and the clearance depth is controllable, so that a footing effect generated in the deeply etching process in an ICP technology is avoided, the manufacturing technology is optimized, and the structural precision and the yield rate of apparatus are improved.

Description

Technical field: [0001] The invention relates to a novel MEMS bionic sound vector sensor structure, which belongs to the field of acoustics. Background technique: [0002] Acoustic detection and positioning technology has important applications in the monitoring fields of ocean, low-altitude and ground moving targets. The small and unique auditory organ of parasitic flies shows surprising positioning ability. It uses the mechanical coupling effect of the bridge between the eardrums between the two ears to amplify the time difference (phase difference) between the sound waves reaching the left and right eardrums, and the nervous system can distinguish The different phase differences generated at different incident angles are used to localize the sound source. [0003] At present, many researchers at home and abroad have developed vector sensors for sound source localization according to the physiological characteristics of parasitic flies. Shivok of the University of Califo...

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Problems solved by technology

Shivok of the University of California et al processed a vector sensor with a sensitive frequency of 3.5KHz by layer-by-layer deposition, but due to the high operating frequency and large underwater propagation loss, it is not conducive to monitoring low-frequency ship noise (Shivok, T.J.Mems Polymumps-Based Mini-ature Microphone for Directional Sound Sensing, Master's Thesis, Monterey, CA: Naval Postgraduate.School.2007)

An Peng and others from Northwestern Polytechnical University have designed a MEMS acoustic vector sensor sensitive structure with a working frequency of 1KHz. However, since the entire device uses ribs to enhance the stiffness of the diaphragm, there are high steps in the process, and the processing is relatively difficult, and it can only be limited to acoustics. test, unable to conduct routine electrical testing

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