Fully-automatic visual inspection machine for wafer

Abstract

The invention provides a fully-automatic visual inspection machine for a wafer, which belongs to the technical field of the machinery and solves the technical problems of low working efficiency and the like in the prior art. The fully-automatic visual inspection machine for the wafer comprises a rack, wherein the rack is provided with a wafer fetching turnplate, a detection turnplate and a material receiving box; a feeding mechanism capable of conveying the wafer to the wafer fetching turnplate is arranged between the rack and the wafer fetching turnplate; a material moving mechanism capable of transferring the wafer on the wafer fetching turnplate to a preset position on the detection turnplate is arranged between the detection turnplate and the wafer fetching turnplate; and an imaging mechanism 1 and an imaging mechanism 2 are arranged above and below the detection turnplate, respectively. The fully-automatic visual inspection machine also comprises an analysis computer connected with the imaging mechanism 1 and the imaging mechanism 2; and a discharging mechanism capable of placing the wafer on the detection turnplate onto different positions in the material receiving box according to a detection result is arranged between the material receiving box and the detection turnplate. Compared with the traditional manual visual inspection mode, the fully-automatic visual inspection machine realizes fully-automatic detection and can improve the working efficiency.

Description

technical field [0001] The invention belongs to the technical field of machinery, and relates to a visual inspection machine, in particular to a fully automatic wafer visual inspection machine. Background technique [0002] Crystal resonator refers to a quartz crystal resonator made of quartz material, commonly known as crystal oscillator, which plays a role in generating frequency in electronic equipment. It has the characteristics of stability and good anti-interference performance, and is widely used in various electronic products. [0003] After years of evolution and development, more than 90% of the world's quartz wafer manufacturers are currently concentrated in China. It can be said that in the field of quartz wafer production and testing equipment, occupying the domestic market will occupy the world market. [0004] Quartz wafers used in industry are cut into pieces from quartz rods, and then processed through a series of processes. Because of the special conditio...

AI Technical Summary

Problems solved by technology

However, the current wafer surface inspection process in the domestic crystal industry relies entirely on manual visual inspection, which has low efficiency and cannot guarantee quality, and relatively high labor costs have also become pressure on enterprises.

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