High-sensitivity dual-axis silicon-micro resonance accelerometer

Abstract

The invention relates to a high-sensitivity dual-axis silicon-micro resonance accelerometer which consists of an upper mechanical part and a lower part, wherein the upper mechanical part comprises a mass block, a micro lever amplification mechanism, tuning fork resonators, an electrostatic comb actuator and a comb tooth capacitor detector; the lower part comprises a signal wire and an electrode; the upper part in the structure of the accelerometer is made on a monocrystalline silicon wafer; the lower part is made on a glass substrate; in an upper mechanical mechanism, one square mass block is adopted to sense accelerated speeds in two orthogonal directions; one ends of four resonators with the same structural parameters are fixed on a substrate through anchor points and the other ends of the resonators are connected with the mass block through a micro lever mechanism; four primary micro levers which are totally same are respectively connected at four vertex angles of the mass block; and the upper mechanical mechanism is suspended above the lower glass substrate through the anchor points at one ends of the resonators and anchor points of a fulcrum of the micro lever mechanism. The high-sensitivity dual-axis silicon-micro resonance accelerometer has the advantages of high sensitivity, strong decoupling capability, large range, high stability, small volume, simple structure and the like and is suitable for the fields of the automobile industry, the aerospace, seismic monitoring and the like.

Description

technical field [0001] The invention belongs to the technical field of micro-electro-mechanical systems, and relates to a high-sensitivity biaxial silicon micro-resonance accelerometer, which is widely used as a micro-inertial device in the fields of automobile industry, aerospace, earthquake monitoring and the like. Background technique [0002] Micromachined accelerometer is one of the most successful devices in microelectromechanical systems. It has broad application prospects in civil and military fields and breeds huge social and economic benefits. The relevant reports on the research of micromachined accelerometers first appeared in the early 1970s. In the 1980s, single-axis micromachined accelerometers appeared on the market. In the late 1990s, multi-axis micromachined accelerometers appeared. It is one of the most representative products. [0003] Accelerometers are divided into piezoresistive, piezoelectric, capacitive, force balance, thermal convection, tunnel cur...

AI Technical Summary

Problems solved by technology

[0008] The technical solution problem of the present invention is: overcome the deficiency of prior art, propose a kind of high-sensitivity biaxial silicon micromachine resonant type accelerometer, to solve existing biaxial resonant type micro-accelerometer sensitivity and resolution are not high, complex structure , environmental temperature and other issues, used for high-precision two-dimensional acceleration measurement

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