Silicon micro-resonant mode pressure sensor based on differential motion structure with coupling beam

Abstract

The invention provides a silicon micro-resonant mode pressure sensor based on a differential motion structure with a coupling beam, relating to a sensor. The silicon micro-resonant mode pressure sensor is provided with a harmonic oscillator, a rectangular silicon island, a rectangular pressure sensitive diaphragm, a silicon frame and a lower layer of glass, wherein the harmonic oscillator is provided with supporting beams, the coupling beam, a movable comb exciting electrode, a movable comb detection electrode, a fixed comb exciting electrode, a fixed comb detection electrode and a vibration mass block; the rectangular pressure sensitive diaphragm is fixed in the silicon frame; the rectangular silicon island is arranged at the position where the stress deflection angle of the rectangular pressure sensitive diaphragm is maximum; the harmonic oscillator is suspended on the surface of the rectangular pressure sensitive diaphragm by the rectangular silicon island through the supporting beams and the supporting beams are connected with the rectangular silicon island; a lead wire electrode is connected with the harmonic oscillator through a flexible beam; the supporting beams are arranged at four corners of the harmonic oscillator; the vibration mass block is connected with the rectangular silicon island and a mechanical coupling beam arranged at the middle part of the harmonic oscillator is used for connecting the vibration mass block; the vibration mass block and the coupling beam are both in suspended states and the vibration mass block is provided with a hole; and the lower layer of glass is arranged at the bottom of the silicon frame.

Description

technical field [0001] The invention relates to a sensor, in particular to a silicon micro-resonant pressure sensor with a coupling beam differential structure. Background technique [0002] Silicon microresonant pressure sensor is the pressure sensor with the highest precision at present. It measures the pressure indirectly by detecting the natural frequency of the object and outputs the quasi-digital signal. Its accuracy is mainly affected by the mechanical characteristics of the structure, so it has strong anti-interference ability and stable performance. In addition, silicon microresonant pressure sensors also have many advantages such as wide frequency band, compact structure, low power consumption, small size, light weight, and mass production, and have always been the focus of research and development in various countries. [0003] In the research and development of silicon microresonant pressure sensors, the United Kingdom, Japan, France, the United States and other...

AI Technical Summary

Problems solved by technology

However, the above-mentioned silicon microresonant pressure sensors are driven by the upper and lower plate structures, the manufacturing process is relatively complicated, and the detection of the external circuit is also difficult, and a stable high-vacuum packaging environment must also be ensured.

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