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Sensor

A sensor and sensitive technology, applied in the field of sensors, can solve the problem that it is difficult for a single sensor to measure the moisture content, and achieve the effect of low power consumption and low cost

Active Publication Date: 2012-05-23
希奥检测有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, a problem with known sensors of this type is that it is difficult to use a single sensor to measure moisture content and CO 2 concentration

Method used

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Embodiment Construction

[0057] first reference figure 1 , generally designate the sensor according to the embodiment of the first aspect of the present invention with the reference numeral 2.

[0058] The sensor 2 comprises a first sensor part 3 with a first capacitor 4 and a second sensor part 5 with a second capacitor 6 . The first capacitor 4 comprises a plurality of first electrodes 8 embedded in a first dielectric 10 consisting of a first material layer 20 . The second capacitor 6 comprises a plurality of second electrodes 12 embedded in a second dielectric 14 also consisting of the first material.

[0059] Each of said capacitors 4, 6 is formed from said first material, which in this example comprises silicon dioxide (SiO 2 ).

[0060] The first material is formed on surface 24 of substrate 22 and includes surface 26 .

[0061] Each of said first and second electrodes 8, 12 is formed of any convenient metal, such as aluminium.

[0062] Typically, the thickness of the electrodes will be in ...

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Abstract

A sensor (2) for sensing a first substance and a second substance, the sensor comprising first (3) and second (5) sensor components each comprising a first material (20), the first material being sensitive to both the first substance and the second substance, the sensor further comprising a barrier (18) for preventing the second substance from passing into the second sensor component (5). The barrier layer is preferably composed of a nanocomposite material comprising a nanoclay inserted into a polymide polymore matrix.

Description

technical field [0001] The present invention relates to a sensor for measuring at least two substances, and in particular but not exclusively to a sensor for measuring relative humidity and CO in air or other atmospheres 2 sensor. Background technique [0002] It is known to sense water vapor and other gases using capacitive or resistive sensors. In capacitive structures, the dielectric constant of the material used to form the structure varies according to the species being measured (eg relative humidity or gas concentration). In a resistive sensor, the resistance of the material forming the sensor varies according to the substance being measured. By recording changes in capacitance or resistance, respectively, it is possible to monitor, for example, the levels of humidity and gas concentrations in a particular environment. [0003] An increasing number of applications require simultaneous measurement of more than one substance. It has therefore been necessary to indivi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/22G01N33/00
CPCG01N33/004G01N27/223
Inventor 奥瑞利·休伯特尤里·维克多诺维奇·波诺马廖夫罗埃尔·达门马蒂亚斯·梅兹
Owner 希奥检测有限公司
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