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Integrated system on ultrasonic transducer sheet with MEMS (Micro-Electromechanical Systems) glass sphere and preparation method thereof

An on-chip integrated system and ultrasonic transducer technology, applied in the field of microfluidics, can solve the problems of difficult to achieve on-chip integration and low efficiency, and achieve the effect of high molding height, simple method and good sphericity

Active Publication Date: 2014-07-02
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The problem with existing technology is that fluids typically need to be taken from the microfluidic system and sonicated in bulky ultrasound systems, which is inefficient and difficult to achieve on-chip integration

Method used

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  • Integrated system on ultrasonic transducer sheet with MEMS (Micro-Electromechanical Systems) glass sphere and preparation method thereof
  • Integrated system on ultrasonic transducer sheet with MEMS (Micro-Electromechanical Systems) glass sphere and preparation method thereof
  • Integrated system on ultrasonic transducer sheet with MEMS (Micro-Electromechanical Systems) glass sphere and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0026] A method for preparing a microfluidic grid on-chip experimental system integrating a spherical glass cavity focused ultrasonic transmitter, comprising the following steps:

[0027] In the first step, a 5000A oxide layer is oxidized on a single-sided polished silicon wafer by a combination of dry and wet oxygen, and the polished surface is spin-coated with AZ P4620 photoresist, exposed and developed to remove the photoresist that needs to be etched on the surface of the microcavity. Utilize Si micromachining process to etch the microcavity and microchannel shallow cavity on the 4-inch Si wafer, and the microchannel connects the shallow cavity. The depth of the cavity is 60-100 microns, the micro-cavity is a square or circular cavity with a width of 1000-5000 microns, the micro-channel cavity is a strip-shaped cavity with a diameter of 50 microns, and the length of the cavity is 5 mm. Cavity square cavity, the micromachining process of the pattern structure on the Si wafe...

Embodiment 2

[0035] A method for preparing a microfluidic grid on-chip experimental system integrating a spherical glass cavity focused ultrasonic transmitter, comprising the following steps:

[0036] In the first step, a 5000A oxide layer is oxidized on a single-sided polished silicon wafer by a combination of dry and wet oxygen, and the polished surface is spin-coated with AZ P4620 photoresist, exposed and developed to remove the photoresist that needs to be etched on the surface of the microcavity. Utilize Si micromachining process to etch the microcavity and microchannel shallow cavity on the 4-inch Si wafer, and the microchannel connects the shallow cavity. The depth of the cavity is 60-100 microns, the micro-cavity is a square or circular cavity with a width of 1000-5000 microns, the micro-channel cavity is a strip-shaped cavity with a diameter of 50 microns, and the length of the cavity is 5 mm. Cavity square cavity, the micromachining process of the pattern structure on the Si wafe...

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Abstract

The invention discloses a method for preparing a microfluidic channel grid on-chip experimental system integrating a spherical glass cavity focused ultrasonic transmitter, which is characterized by the following steps: the first step is to prepare a spherical glass microcavity or a cylindrical microfluidic system by using a thermoforming method The second step is to integrate vibration excitation sources such as metal strips on the prepared spherical glass microcavity or cylindrical microfluidic channel. The third step is to place the excitation source in the glass microfluidic grid integrated on-chip experimental system. For biological cells or molecules, the fourth step is to use the integrated on-chip experimental system to process biological cells or molecules. The invention is based on the fact that the glass sphere cavity itself generates resonance at a frequency of 20 kHz to 1 MHz under the condition of external electric excitation or electromagnetic excitation. The resonant frequency band is an ultrasonic frequency band, and the cavitation effect generated by ultrasonic waves can be used in microprocessing in the field of biology or chemistry, such as cell crushing and DNA interruption.

Description

technical field [0001] The invention relates to a microfluidic control technology, in particular to a MEMS glass spherical ultrasonic transducer on-chip integrated system and a preparation method thereof. Background technique [0002] The 21st century is a century in which biotechnology will be highly developed. After years of practice, bioanalysis and detection technology has gradually developed and matured. In the process of biological analysis and detection, samples in single molecule or cell detection experiments need to be pretreated, crushed, separated, reacted, analyzed and detected in different conditions and equipment due to the different molecular sizes. If the various steps of the whole experimental process can be integrated, the efficiency of biological experiments and the yield of experimental products will be greatly improved, and the accuracy of experiments will be improved at the same time. [0003] High-intensity focused ultrasound (HIFU for short) technolo...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B06B1/02B81B7/02B81C1/00G01N35/00
Inventor 尚金堂罗新虎秦顺金
Owner SOUTHEAST UNIV
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