Flat plate type totally-sealed low-temperature plasma excitation source
A low-temperature plasma, fully-sealed technology, applied in the direction of plasma, electrical components, etc., can solve the problems affecting the mechanism research and detection sensitivity of target components, unfavorable qualitative and quantitative analysis of target components, interference with characteristic excitation lines, etc. Achieve the effect of improving excitation efficiency, improving detection sensitivity, and increasing discharge area
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[0011] figure 1 Among them, the flat-plate fully sealed low-temperature plasma excitation source is composed of an upper ceramic sheet 1, a lower ceramic sheet 2 and a peripheral side 3, and the upper ceramic sheet 1 and the lower ceramic sheet 2 are bonded together through the peripheral side 3 in parallel to form a The hollow discharge chamber 8, the upper ceramic sheet 1 and the lower ceramic sheet 2 are respectively pasted with tin foil 4 as discharge electrodes, and the surrounding side surfaces 3 are respectively provided with quartz windows 5, air inlets 6 and exhaust ports 7 (see figure 2 ).
[0012] The hollow discharge chamber 8 is in the shape of a cuboid, the quartz window 5 is attached to the front end of the surrounding side 3, the air inlet 6 is arranged on the rear end opposite to the quartz window 5, and the exhaust port 7 is arranged on the other side.
[0013] The working principle of the present invention is as follows: a flat-plate fully sealed low-tempe...
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