Flexible low-voltage voltage-dependent resistor and production method thereof
A varistor, low-voltage technology, applied in the electronic field, can solve the problems of no one proposed, inflexible, large varistor, etc., to achieve the effect of simple process, unique flexibility, and strong practical significance
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[0012] as attached figure 1 As shown, a flexible low-voltage varistor with a layered structure includes a flexible substrate 1, a lower electrode film 2, a ZnO film 3, and an upper electrode film 4 in sequence. The lower electrode film 2 completely covers the flexible substrate 1, and the ZnO film 3 partially covers The lower electrode film 2 ; the upper electrode film 4 is connected with the upper electrode lead 5 , and the lower electrode film 2 is connected with the lower electrode lead 6 .
[0013] Among them, the flexible substrate 1 is made of PET film, the upper electrode film 4 and the lower electrode film 2 are made of 15-50nm thick Pt film, the upper electrode lead 5 and the lower electrode lead 6 are made of gold wire or aluminum wire, and the thickness of the ZnO film is 10-100nm .
[0014] The manufacturing method of the flexible low-voltage varistor is as follows:
[0015] Step (1) Select a flexible PET film as the flexible substrate, and deposit a layer of 15-...
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