Small-Abbe-error three-dimensional measurement system

Abstract

The invention discloses a small-Abbe-error three-dimensional measurement system, which is characterized in that the small-Abbe-error three-dimensional measurement system is arranged in a mechanical transmission unit and comprises an X-direction assembly, a Y-direction assembly and a Z-direction assembly, a Z-direction clamp head used for clamping a sensor is fixedly arranged on a Z-direction slide seat arranged in the Z-direction assembly, and gratings consisting of grating rulers and grating heads respectively comprise an X-direction grating assembly, a Y-direction grating assembly and a Z-direction grating assembly. The small-Abbe-error three-dimensional measurement system has the technical effects of high efficiency, accuracy and simplicity when being applied to the thermal deformation detection, and the Abbe errors can be effectively reduced.

Description

technical field [0001] The invention relates to a small Abbe error three-dimensional measuring system for measuring thermal deformation. Background technique [0002] In modern precision machinery and instrument engineering technology, the thermal error caused by temperature accounts for 40-70% of the total error of the instrument accuracy, and has become a key factor affecting its performance and accuracy. Accurately measuring the thermal deformation characteristics of the experimental object is the fundamental guarantee for the theory and application of mechanical thermal error. [0003] In order to accurately measure the thermal deformation of mechanical parts in the temperature field environment, the inventor of this application has previously submitted two Chinese patent applications, one is the application number: 99211681.3, and the name is: High-precision measuring device for thermal deformation of precision parts However, on the one hand, the device can only be use...

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Problems solved by technology

[0003] In order to accurately measure the thermal deformation of mechanical parts in the temperature field environment, the inventor of this application has previously submitted two Chinese patent applications, one is the application number: 99211681.3, and the name is: High-precision measuring device for thermal deformation of precision parts However, on the one hand, the device can only be used for two-dimensional measurement, and on the other hand, it cannot realize numerical control, thus limiting its measurement function; the other is the application number: 200410014822.1, and the name is: three-dimensional high-precision multi-function Patent application for the thermal deformation experimental device, which can realize three-dimensional measurement, and the constant temperature box has a temperature digital display function

However, due to the X-, Y-, and Z-direction movements of the manual operation table, the operation is complicated, the measurement workload of manual readings is heavy, the experiment is time-consuming, the data statistics are slow, and the efficiency of mathematical modeling is low.

The measurement accuracy has the characteristics of timeliness, that is, the experimental device in the incubator uses iron as the main structure, and the main structure has the characteristics of temperature deformation, and the thermal error of the experimental device itself is difficult to avoid; not only that, the main structure of the device adopts the traditional superimposed three-dimensional work The structure of the table is seriously affected by the Abbe error; also due to the superposition of the structure, there is a phenomenon that the movement of the worktable to the edge of the guide rail is seriously affected by the force deformation, resulting in a large comprehensive error of the experimental device body

In order to maintain high precision, it is necessary to periodically correct the error of the entire experimental device, resulting in an increase in maintenance costs

In addition, when the device provides different temperature field environments for different incubators, the experimental device cannot be moved, so it is not universal, which limits the actual use

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