A method for direct growth of graphene on various substrates
A graphene, direct technology, applied in the direction of gaseous chemical plating, metal material coating process, coating, etc., can solve the problems that limit the development and application of graphene, achieve high quality and conductivity, low temperature, and simple growth process Effect
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Embodiment 1
[0026] The aluminum oxide thin film obtained by atomic layer deposition (ALD) method is used as the substrate, put into the PECVD cavity, and vacuumed to 10 -3 Torr, the substrate is heated to 450°C, methane gas and nitrogen gas are introduced, and the pressure of the controlled gas does not exceed 1 Torr. Turn on the plasma power supply at 100 watts, react for 2 hours, methane is ionized and cracked into active groups CH 3+ 、CH 2 2+ 、CH 3+ , at 450°C, the active groups on the surface of the substrate react, carbon-carbon bonds are formed, dehydrogenated, and connected at the edge, and graphene is grown directly in the way of nucleation-growth-film formation.
Embodiment 2
[0028] SiO 2 As the substrate, put it into the PECVD chamber and evacuate to 10 -3 Torr, the temperature of the substrate is raised to 500°C, ethylene gas is introduced, and the pressure of the gas is controlled at 0.2-0.6 Torr. Turn on the plasma power supply at 80 watts and react for 3 hours to ionize and crack ethylene gas into active groups C 2 h 3 + 、C 2 h 2 2+ 、C 2 h 3+ , the active groups on the surface of the substrate react at 500 ° C, carbon-carbon bonds are formed, dehydrogenated, and connected at the edge, and graphene is directly grown in the way of nucleation-growth-film formation.
Embodiment 3
[0030] Take the quartz plate as the substrate, put it into the PECVD cavity, and evacuate to 10 -3 Torr, the temperature of the substrate is raised to 550°C, ethylene and acetylene gas are introduced, and the pressure of the controlled gas does not exceed 1 Torr. Turn on the plasma power supply at 100 watts and react for 2 hours to ionize and crack ethylene and acetylene into active groups C 2 h 3 + 、C 2 h 2 2+ 、C 2 h 3+ 、C 2 h + , the active groups on the surface of the substrate react at 550°C, carbon-carbon bonds are formed, dehydrogenated, and connected at the edge, and graphene is directly grown in the way of nucleation-growth-film formation.
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