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Silicon micro angular vibration output gyroscope

A technology of gyroscope and angular vibration, which is applied in directions such as steering sensing equipment, can solve problems such as the difficulty of processing vertical torsion bars, and achieve the effects of improving sensitivity and stability, reducing difficulty, and reducing impact

Active Publication Date: 2011-11-23
NANJING UNIV OF SCI & TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, in the bulk silicon process, it is quite difficult to process the vertical torsion bar

Method used

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  • Silicon micro angular vibration output gyroscope
  • Silicon micro angular vibration output gyroscope
  • Silicon micro angular vibration output gyroscope

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Embodiment Construction

[0012] combine figure 1 , the silicon micro-angular vibration output gyroscope of the present invention is used to measure the angular rate in the Z-axis direction. The gyroscope consists of an upper mechanical structure and a lower glass substrate. The upper mechanical structure of the gyroscope is composed of a pair of identical substructures 100, 200. The two substructures 100, 200 are symmetrically arranged left and right, and are connected to each other through the mass connection mechanism 6. At the same time, the two substructures 100, 200 are connected to the beam 3a , 3b connection. The first beam 3a is connected to the first fixed base 1a through the first group of horizontal torsion bars 2a, 2b, 2c, 2d. The second beam 3b is connected to the second fixed base 1b through a second group of horizontal torsion bars 2e, 2f, 2g, 2h. The mass connection mechanism 6 is composed of two connecting rods 6a, 6b and a connecting frame 6c. One end of the two connecting rods 6a...

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Abstract

The invention relates to a silicon micro angular vibration output gyroscope composed of an upper layer and a lower layer. The upper layer is a gyroscope mechanical structure arranged on a monocrystalline silicon wafer. The lower layer comprises signal leads arranged on a glass substrate. The upper mechanical structure is composed of two similar-structured substructures, wherein the substructures are symmetrically arranged left and right, and the substructures are connected through a mass block connecting mechanism. The two substructures are respectively connected to crossbeams, which are connected to fixed pedestals through horizontal torsion bars. The fixed pedestals are arranged on fixed pedestal bonding sites on the glass substrate. Therefore, the upper mechanical structure is suspended above the lower glass substrate. The signal leads and the bonding sites are arranged on the lower glass substrate. According to the invention, with the horizontal torsion bar and the crossbeams, the gyroscope rotates around the z axis. Therefore, sensitive motion of the gyroscope is realized; motion decoupling of a driving direction and a detection direction is realized; the number of interference modes is reduced; requirement to processing precision is reduced; and sensitivity of the gyroscope is improved.

Description

technical field [0001] The invention belongs to micro-electromechanical system and micro-inertia measurement technology, in particular to a silicon micro-angle vibration output gyroscope. Background technique [0002] Micromachined inertial instruments include micromachined gyroscopes (MMG) and micromachined accelerometers (MMA). The use of microelectronic processing technology allows the complete integration of micromechanical structures and required electronic circuits on a silicon chip, thereby achieving a high degree of unity in terms of performance, price, volume, weight, and reliability. Therefore, this type of instrument has a series of advantages (such as small size, light weight, cheap price, high reliability, mass production, etc.), and has broad application prospects in both military and civilian fields. In civilian use, it is mainly used in the automotive industry, industrial monitoring and consumer products and robotics, such as airbags, anti-lock braking syste...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/56
Inventor 苏岩姜劭栋丁衡高裘安萍施芹
Owner NANJING UNIV OF SCI & TECH
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