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Double frequency laser interferometer for absolute distance measurement and measurement method thereof

A dual-frequency laser interference, absolute distance technology, applied in measurement devices, optical devices, radio wave measurement systems, etc., can solve the problem of not considering the influence of light intensity control items, unable to meet high-precision measurement and other problems

Active Publication Date: 2011-08-31
BEIJING GUOWANG OPTICAL TECH CO LTD
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Problems solved by technology

[0005] The above formula does not consider the influence of the light intensity modulation item in the process of signal processing, thus introducing a certain system error. The measurement accuracy is only 6 μm, which cannot meet the requirements of high-precision measurement.

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  • Double frequency laser interferometer for absolute distance measurement and measurement method thereof
  • Double frequency laser interferometer for absolute distance measurement and measurement method thereof
  • Double frequency laser interferometer for absolute distance measurement and measurement method thereof

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Embodiment Construction

[0057] The present invention will be further described below in conjunction with examples and accompanying drawings, but the protection scope of the present invention should not be limited thereby.

[0058] The structure diagram of the dual-wavelength absolute distance measuring interferometer of the present invention is as follows: figure 1 shown. As can be seen from the figure, the dual-wavelength absolute distance measuring interferometer of the present invention includes a first light source 1 with a first light source controller 2, a second light source 10 with a second light source controller 11, a first fiber coupler 3, Second optical fiber coupler 5, isolator 4, collimator 6, photodetector 7, piezoelectric ceramics 9, data acquisition card 12 and computer 13, described first light source controller 2 provides direct current for the first light source 1 Driving current and sinusoidal alternating current, the light beam emitted by the first light source 1 enters the fir...

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Abstract

The invention relates to a double frequency laser interferometer for absolute distance measurement and a measurement method thereof. The double frequency laser interferometer comprises a light source, an optical fiber coupler, an isolator, a collimator, a photoelectric detector, a piezoelectric ceramic, a data acquisition card and a computer, wherein the light source adopts two semiconductor lasers in different wavelengths having light source controllers; the photoelectric detector is used for converting a received interference signal into an electric signal and inputting to the data acquisition card; and the computer is used for performing data treatment, thereby acquiring a to-be-measured distance. The linear frequency modulation technique is combined with the sine phase modulation interference measurement technique in the interferometer provided by the invention, thereby widening the measurement scope. The phase of an interference signal is calculated by solving a linear equation by utilizing the related parameters, thereby eliminating the system error caused by light intensity modulation of the light source in principle and increasing the measurement precision.

Description

technical field [0001] The invention relates to an absolute distance measurement interferometer, in particular to a dual-frequency laser interferometer for absolute distance measurement and a measurement method thereof. Background technique [0002] Distance measurement plays an important role in industrial production and scientific research. Interferometry technology is widely used in absolute distance measurement because of its advantages of high precision, high resolution and non-contact. The sinusoidal phase modulation interferometry technology is an international cutting-edge interferometry technology, which has the advantages of high precision, convenient modulation, and simple structure. It has been valued by researchers for a long time, and has been greatly developed in the field of absolute distance measurement. [0003] Sinusoidal phase-modulated interferometers for absolute distance measurement are nanometer-accurate but measure only half a wavelength. In order ...

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Application Information

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IPC IPC(8): G01B9/02G01B11/02G01S17/32
Inventor 王渤帆李中梁王向朝步扬
Owner BEIJING GUOWANG OPTICAL TECH CO LTD
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