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Manufacture method of liquid crystal orientation layer

A technology of liquid crystal alignment layer and manufacturing method, which is applied in the direction of coating, metal material coating process, ion implantation plating, etc., can solve the problems that cannot be completely solved, the surface state of rubbed fabric is difficult to control, and the pretilt angle of liquid crystal molecules is inconsistent and other problems, to avoid rubbing foreign matter and mura, to avoid poor display characteristics, and to shorten production time

Inactive Publication Date: 2013-03-06
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] (1) Since the rubbing fabric rubs against the glass substrate to form orientation grooves in the rubbing process, and the surface state of the rubbing fabric is difficult to control, which easily leads to uneven orientation of the orientation grooves, resulting in inconsistent pretilt angles of liquid crystal molecules, and The pretilt angle of liquid crystal molecules is very important to the display characteristics of liquid crystal displays;
[0009] (2) The friction between the rubbing fabric and the glass substrate will cause frictional foreign matter and various poor picture quality (mura), which will affect the display characteristics of the liquid crystal display;
[0010] (3) In the above production process, the alignment film is formed by a liquid alignment liquid, so it needs to be cured. Specifically, it needs to go through two processes of pre-curing and main curing, which takes a long time
[0011] Aiming at the problems of uneven orientation, rubbing foreign matter and mura in the production process, people in the industry have provided many solutions. For example, some solutions are mentioned in the application documents of Chinese patent application No. These methods are simply improved on the basis of the original equipment or process, but cannot completely solve the problems in the traditional technology, and even increase the process flow, thereby increasing the production cost

Method used

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  • Manufacture method of liquid crystal orientation layer
  • Manufacture method of liquid crystal orientation layer
  • Manufacture method of liquid crystal orientation layer

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Effect test

Embodiment 1

[0098] In this embodiment, the degree of vacuum in the deposition chamber 200 is 10 -6 Torr, the glass substrate is heated from 270 to 300 °C, H 2 The flow rate is 50sccm, CH 4 The flow rate is 0.2sccm, the power of the high-frequency voltage 220 is 5MHz, and the gas pressure is 50×10 2 Pa; the distance between the ion gun 510 and the glass substrate 270 is 10 cm, the relative angle 530 to the glass substrate 270 is 40°, and the skew angle 540 is 3°.

[0099] Such as Figure 10 Shown, the preparation method of liquid crystal alignment layer of the present invention comprises the following steps:

[0100] (a1) A deposition chamber 200 is provided, a base 260 is provided on the anode side of the deposition chamber 200, a glass substrate 270 is provided on the base 260, and a gas distributor 230 is provided on the cathode side;

[0101] (a2) evacuate the deposition chamber 200 to a vacuum state through the exhaust hole 250 on the deposition chamber 200, and its vacuum degree ...

Embodiment 2

[0107] In this embodiment, the degree of vacuum in the deposition chamber 200 is 10 -7 Torr, the glass substrate is heated from 270 to 450 °C, H 2 The flow rate is 500sccm, CH 4 The flow rate is 10sccm, the power of the high-frequency voltage 220 is 20MHz, and the gas pressure is 500×10 2 Pa; the distance between the ion gun 510 and the glass substrate 270 is 25 cm, the relative angle 530 to the glass substrate 270 is 45°, and the skew angle 540 is 7°.

[0108] The preparation method of the liquid crystal alignment layer of the present invention comprises the following steps:

[0109] (b1) Set up a deposition chamber 200, a base 260 is provided on the anode side of the deposition chamber 200, a glass substrate 270 is provided on the base 260, and a gas distributor 230 is provided on the cathode side;

[0110] (b2) The deposition chamber 200 is pumped to a vacuum state through the exhaust hole 250 on the deposition chamber 200, and its vacuum degree is 10 -7 Torr;

[0111]...

Embodiment 3

[0116] In this embodiment, the degree of vacuum in the deposition chamber 200 is 10 -6 Torr, the glass substrate is heated from 270 to 400 °C, H 2 The flow rate is 250sccm, CH 4 The flow rate is 5sccm, the power of the high frequency voltage 220 is 10MHz, and the gas pressure is 100×10 2 Pa; the distance between the ion gun 510 and the glass substrate 270 is 20 cm, the relative angle 530 to the glass substrate 270 is 42.5°, and the skew angle 540 is 4°.

[0117] The preparation method of the liquid crystal alignment layer of the present invention comprises the following steps:

[0118] (c1) Set up a deposition chamber 200, a base 260 is provided on the anode side of the deposition chamber 200, a glass substrate 270 is provided on the base 260, and a gas distributor 230 is provided on the cathode side;

[0119] (c2) Evacuate the deposition chamber 200 to a vacuum state through the exhaust hole 250 on the deposition chamber 200, and its vacuum degree is 10 -6 Torr;

[0120]...

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Abstract

The invention discloses a manufacture method of a liquid crystal orientation layer, comprising the following steps: (1) arranging a deposition cabin, arranging targets on the cathode side of the deposition cabin, and arranging a glass substrate on the anode side of the deposition cabin; (2) vacuumizing the deposition cabin; (3) filling inert gas into the deposition cabin; (4) applying direct-current high voltage on the glass substrate and the target, ensuring that the target sputters target atoms under the action of electric field and under certain gas pressure, and depositing on the glass substrate to form an orientation film, wherein the pressure of inert gas is 50-6000Pa; and (5) adopting an ion gun with a certain relative angle and an inclined angle with the glass substrate, carrying out ion bombardment on the orientation film arranged on the surface of the glass substrate, and forming an orientation slot on the orientation film so as to form the liquid crystal orientation layer. The invention can bring more consistent orientation of the liquid crystal orientation layer so as to improve the display quality of the liquid crystal display; in addition, the invention can lower the manufacture cost.

Description

[0001] This application is a divisional application of (application number: 200810102480.7, filing date: 2008-03-21, invention title: method for manufacturing liquid crystal alignment layer). technical field [0002] The invention relates to liquid crystal display technology, in particular to a method for manufacturing a liquid crystal alignment layer. Background technique [0003] In addition to other components such as polarizers and glass substrates, a liquid crystal display also includes a liquid crystal layer. The orientation behavior of the liquid crystal layer determines most of the optical properties of the liquid crystal display, and this orientation is determined by the orientation of the liquid crystal layer in contact with the liquid crystal layer. layer, the alignment layer is also called a liquid crystal alignment layer. The liquid crystal alignment layer provides a pretilt angle for the liquid crystal molecules close to the surface of the liquid crystal layer,...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02F1/1337C23C14/34C23C14/58C23C16/455C23C16/56
Inventor 路林林
Owner BOE TECH GRP CO LTD
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