Electrode structure for improving speed and efficiency of MZI (Math-Zehnder Interferometer) electro-optic modulator

Abstract

The invention relates to an electrode structure for improving the speed and the efficiency of an MZI (Math-Zehnder Interferometer) electro-optic modulator, comprising an MZI modulator structure. The MZI modulator structure comprises a first modulation arm, a second modulation arm and a high-frequency driving circuit, wherein the first modulation arm and the second modulation arm are in crestiform light guide structure and respectively comprise a first flat area, a second flat area, a first inner ridge area and a second inner ridge area, the first flat area and the second flat area at both sides of the first inner ridge area and the second inner ridge area are respectively provided with a first doping area, a second doping area, a third doping area and a fourth doping area which are in PIN (Personal Identification Number) electric modulation structure when in the first flat area and the second flat area, the second doping area and the third doping area which are adjacent to the inner sides of the first modulation arm and the second modulation arm are connected together with a metal lead to form a first electrode of the high-frequency driving circuit, and the first doping area and the fourth doping area are connected together with a metal lead to from a second electrode of the high-frequency driving circuit, both ends of which are respectively connected with the first electrode and the second electrode of the high-frequency driving circuit.

Description

technical field [0001] The invention relates to an electric driving mode and an electrode structure capable of improving the response speed and modulation efficiency of an electro-optical modulator for controlling the carrier concentration of an MZI ridge optical waveguide. Background technique [0002] For highly symmetric crystals (such as silicon), electro-optic modulation generally utilizes carrier absorption, or utilizes the plasmonic dispersion effect in which the carrier concentration affects the refractive index of the material. The Mach-Zehnder Interserometer (MZI) refers to: first divide the light and other energy input into the optical waveguide into two beams and enter two different optical waveguide modulation arms, where the plasma dispersion effect is used to adjust a The phase of the beams of light makes the two beams of combined beams enter the output optical waveguide in equal phase or produce a π phase shift difference, so that the output optical waveguide...

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Problems solved by technology

[0004] However, in the traditional MZI electro-optic modulator structure, the optical phase on one modulation arm is generally adjusted through the action of carriers, and the modulation efficiency is half that of adjusting two modulation arms at the same time, so the present invention aims to adopt a suitable Electric drive method to take full advantage of the two modulation arms

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