Fourier laminated microimaging device and method
A technology of Fourier stacking and microscopic imaging, which is applied in microscopes, measuring devices, optics, etc., can solve the problems of low resolution and low efficiency of restoring sample images, and achieve high resolution, easy large-angle illumination, and modulation high efficiency effect
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[0102] The liquid crystal beam deflection device 3 adopts a liquid crystal prism;
[0103] The microscopic objective lens 5 adopts a twice achromatic microscopic objective lens, the numerical aperture NA is 0.1, and the objective lens aperture is 15mm;
[0104] The sample to be tested (such as figure 2 ) is the USAF1951 standard resolution board;
[0105] Laser 1 selects a red He-Ne laser with a wavelength of 632nm;
[0106] Collimating lens 2 collimates the laser beam to the parallel light;
[0107] Camera 7 uses a CCD sensor with a pixel size of 5.5um;
[0108] The liquid crystal prism is placed close to the bottom of the sample stage 4;
[0109] The desired synthetic numerical aperture NA' is 0.3, and it is necessary to ensure that the spectral overlap ratio = 50%.
[0110] Follow the steps below to implement:
[0111] The first step: determine the beam angle α of each modulation of the liquid crystal prism i,j .
[0112] 1.1 According to N=2NA' / NA, calculate N=6...
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