Swing arm type three-dimensional contourgraph

Abstract

The invention relates to a swing arm type three-dimensional contourgraph which comprises a measuring head system, a transverse arm, an upright post, a counter weight, a measured plane element, a workpiece turntable and a transverse arm turntable, wherein one end part of the upright post is arranged in a mounting hole of the transverse arm turntable and fixedly connected with the transverse arm turntable, and the transverse arm is arranged in another end part mounting hole of the upright post; one end part of the transverse arm is provided with the counter weight, while the other end part of the transverse arm is provided with the measuring head system; the measured plane element is arranged on the workpiece turntable; a detection end of the measuring head system is in contact with the measured plane element; and the transverse arm and the upright post are used for finishing the rotating motion of the measuring head system; and the counter weight is used for balancing the measuring head system and the transverse arm so as to guarantee the transverse arm turntable to maintain stable rotation. The contourgraph can be used for the measurement and the analysis of the three-dimensional surface profile of a heavy-caliber high-precision plane element, wherein measurable parameters comprise three-dimensional morphologies, two-dimensional morphologies, PV (Peak Value), RMS (Root Mean Square) and three-dimensional morphological volumes.

Description

technical field [0001] The invention belongs to the field of precision testing, in particular to a swing-arm type three-dimensional profiler used for three-dimensional surface profile measurement of planar components. Background technique [0002] The three-dimensional surface profile measurement of planar components is an effective means to understand the surface topography of components, the machining accuracy of machine tools and the removal amount of machine tools. The parameters involved include three-dimensional topography, two-dimensional topography, PV, RMS, three-dimensional topography volume, etc. There are two main types of profilers on the market today. One is a two-dimensional profile measuring instrument for large-scale planar components. The measurement range of this instrument can reach hundreds of millimeters, and it can be used to measure the surface profile of some radial surfaces of rotationally symmetrical planar components. The disadvantage of this inst...

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Problems solved by technology

[0005] Compared with the prior art, the present invention has the following advantages: the detector of the present invention uses a high-precision air-floating turntable to ensure measurement accuracy, and at the same time adopts the working mode of simultaneous rotation of the workpiece turntable and the cross-arm turntable to solve the problem that the traditional inspection method can only measure two-dimensional For the problem of small profile and measurement range, it can be used for large-caliber (hundreds of millimeters), high-precision (0.1μm) three-dimensional surface profile measurement and analysis, and the measurable parameters include three-dimensional topography, two-dimensional topography, PV , RMS, 3D topography volume, etc.

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