Ceramic insulating film heat-conducting substrate and manufacturing method thereof
A technology of ceramic insulating and thermally conductive substrates, which is used in semiconductor/solid-state device manufacturing, semiconductor devices, and semiconductor/solid-state device components, etc. Realize the effect of industrialization and easy industrialization
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[0037] In order to make the purpose, technical solution and advantages of the present invention clearer and clearer about a ceramic insulating film heat-conducting substrate and its manufacturing method, the present invention will be described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
[0038] A kind of manufacture method of ceramic insulation film thermal conduction substrate of the present invention, such as figure 1 shown, including the following steps:
[0039] Step S110, cleaning and roughening the surface of the metal substrate to form a rough and clean surface on the surface of the metal substrate; wherein, the metal substrate is made of one of aluminum, copper, steel, titanium, molybdenum, and tungsten or its alloys, stainless steel, or, Kovar. The surface of the metal substrate can be...
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