Device for measuring straightness/coaxiality by applying laser

Abstract

The invention discloses a device for measuring straightness / coaxiality by applying laser, comprising a first Wollaston prism, a second Wollaston prism and a transitional reflector which are arranged on the measuring light path in sequence, wherein the second Wollaston prism and the first Wollaston prism are positioned on the path of the light which returns after being reflected by the transitional reflector in sequence; the transitional reflector is of plane mirror structure with light path drift adaptation functions in the two mutually vertical directions; and when the incident light enters along the characteristic direction of the transitional reflector, the light which returns after being reflected by the transitional reflector is opposite and parallel to the incident light, and the distance between the light which returns and the incident light is constant. The device ensures the datum to be invariant during measuring the straightness in the horizontal and vertical directions, thus greatly simplifying the adjustment process, shortening the adjustment time and improving the adjustment efficiency.

Description

technical field [0001] The invention belongs to the technical field of laser precision measurement, in particular to a device for high-precision measurement of straightness / coaxiality using laser. Background technique [0002] The measurement of straightness is one of the most basic measurement items in the field of geometric metrology. Long-distance straightness measurement is used in the installation and alignment of guide rails, the installation and positioning of large instruments, the manufacturing and testing of precision instruments, large-scale measurement, and military product manufacturing. Has a wide range of applications. In many projects, it is required to measure the coaxiality of multiple sets of shafts and holes, and it is required that the measurement can be carried out intermittently. Compared with the straightness, the coaxiality measurement puts forward higher requirements. [0003] Yin Chunyong of Tsinghua University proposed a method for measuring stra...

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Problems solved by technology

[0028] Since the above method uses the characteristic direction of the rectangular prism (i.e. the normal synthesis direction of the reflective surface of the rectangular prism, also known as the angle bisector) as the reference straight line, the measured straightness in the horizontal or vertical direction is the target motion The deviation of the trajectory relative to the reference straight line, and step 8 requires manual rotation of the rectangular prism, Wollaston prism, movable sleeve (including the second analyzer and the second photoelectric receiver fixed on it) around the axis of the incident light path 90 degrees, the angle bisector of the rectangular prism after manual rotation cannot be guaranteed to coincide with the angle bisector before rotation, and according to the requirements of the working principle of the laser interferometer measured by straightness / coaxiality, it is necessary to ensure that the direction of the laser beam is consistent with the rectangular prism The characteristic directions of the rectangular prisms are consistent, which requires fine-tuning the pitch and yaw angles of the right-angle prism again. The adjustment process is cumbersome, the workload is heavy, and the measurement time is long; , the second photoelectric receiver and the movable sleeve are all integrated in the laser head, rotating the second analyzer, the second photoelectric receiver and the movable sleeve means that the laser head needs to be rotated, so the horizontal direction in the laser head The Zeeman dual-frequency laser light source, telescope and beam splitter also rotate accordingly, so the workload of optical path adjustment is very large

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