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Composite vacuum pump

A technology of vacuum pump and pump casing, applied in the field of dry composite vacuum pump, can solve the problems of large, heavy and high energy consumption of the pump body, and achieve the effects of high pumping speed, low energy consumption and small size

Inactive Publication Date: 2010-10-06
储继国
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the pump has high energy consumption, large and heavy pump body, and the ultimate vacuum can only reach the medium vacuum section.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0038] Embodiment 1: Vertical Siegbahn molecular pump

[0039] Such as Figure 1a , 1b As shown in and 1c, the vertical Siegbahn molecular pump includes a pump casing 17, a stationary wheel 11, a moving wheel 12, a dynamic seal 18, a rotor 13, a rotating shaft 14 and a spacer ring 110.

[0040] The stationary wheel 11, the dynamic seal 18 and the spacer ring 110 are fixed on the pump casing 17, the moving wheel 12 is fixed on the rotor 13, and an axial air inlet is arranged between the moving wheel 12 and the spacer ring 110. Mouth 16.

[0041] Specifically, the static wheel 11 is provided with several helical blades 15 (six in this embodiment), the cross-section of the blades 15 is cross-shaped, and the space between every two adjacent blades 15 forms an air extraction groove 111 , there is an opening in the middle of the bottom of the air extraction groove 111; the static wheel 11 adopts a single or multiple parallel combination; one side of the static wheel 11 or the stat...

Embodiment 2

[0044] Embodiment 2: Horizontal Siegbahn molecular pump

[0045] The basic structure of this embodiment is similar to Embodiment 1, as Figure 2a , 2b As shown in and 2c, the horizontal Siegbahn pump includes a pump casing 26, a stationary wheel 21, a dynamic seal 27, a spacer ring 29, a moving wheel 22, a rotor 23 and a shaft 24.

[0046] The static wheel 21, the dynamic seal 27 and the spacer ring 29 are fixed on the pump casing 26; the static wheel 21 adopts a single or multiple (shown as 2 in Figure 2) parallel combination; the static wheel 21 Or both sides of the stationary wheel set are respectively provided with dynamic seals 27; the periphery of the stationary wheel 21 or the stationary wheel set is provided with a radial air inlet 211, and the pump casing 26 corresponds to the air inlet 211 A gas channel 212 is opened at the position; the moving wheel 22 is fixed on the rotor 23 ; the inner side of the moving wheel 22 is provided with an exhaust port 28 .

[0047] ...

Embodiment 3

[0049] Embodiment 3, A-type Gaede traction molecular pump

[0050] This example Figure 3a , 3b As shown in and 3c, the A-type Gaede molecular pump consists of a pump casing 37, a static wheel 31, a moving wheel 32, a moving wheel 311, a rotor 34, a rotating shaft 35 and a spacer ring 38.

[0051] The stationary wheel 31 and the spacer ring 38 are fixed on the pump casing 37 , the moving wheel 32 and the moving wheel 311 are fixed on the rotor 34 , and the inner side of the moving wheel 32 is provided with a gas channel 36 .

[0052] Specifically, the stationary wheel 31 is composed of a groove top 39, several (two shown in the figure) dynamic seals 314, an air extraction groove 33 and a groove bottom 310, forming an integral structure.

[0053] Both sides of described dynamic seal 314 are provided with air inlet 312 and exhaust port 313; Described air inlet 312 and exhaust port 313 are respectively positioned on groove bottom 310 and groove top 39; The section of described ...

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PUM

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Abstract

The invention belongs to the field of vacuum-pumping equipment and provides a composite vacuum pump which comprises a pump shell, a gas inlet and a gas outlet, wherein the gas inlet and the gas outlet are formed on the pump shell; a plurality of levels of molecular drag pumps and Roots pumps, which are installed coaxially, are arranged in the pump shell; the molecular drag pumps are combined in parallel or series and are arranged at the part near the gas inlet; the Roots pumps are combined in series and are arranged at the part near the gas outlet; and the molecular drag pumps and the Roots pumps are combined in series. The composite vacuum pump provided by the invention has the advantages of high pumping speed, high ultimate vacuum, low energy consumption, small size and light weight and can also acquire clean medium vacuum and high vacuum.

Description

technical field [0001] The invention relates to the field of vacuum equipment and provides a dry composite vacuum pump which is composed of a Roots pump and a traction molecular pump. Background technique [0002] The existing direct exhaust atmospheric multistage Roots pump can obtain clean medium vacuum, and has been widely used in microelectronics and optoelectronics industries. However, the pump has high energy consumption, large and heavy pump body, and the ultimate vacuum can only reach the medium vacuum section. For example: 30L / s Roots pump with 5 stages in series, the ultimate vacuum is only 10 -1 Pa, with a volume of 800×400×600 and a weight of more than 200kg. Contents of the invention [0003] The object of the present invention is to overcome the deficiencies of the prior art and provide a composite vacuum pump with low energy consumption, small volume, light weight and high ultimate vacuum. [0004] The present invention is achieved in this way, a composit...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F04B41/06F04B37/14F04D19/04F04C18/14
Inventor 储继国
Owner 储继国
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