Laminated bottom antireflex structure and etching method
A bottom anti-reflection and bottom anti-reflection layer technology, which is applied in the direction of electrical components, semiconductor/solid-state device manufacturing, circuits, etc., can solve problems such as graphics influence and semiconductor device quality, and achieve the effect of maintaining accuracy
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[0024] Such as figure 1 As shown, the specific embodiment provides a laminated structure 100 for photolithography, including a bottom anti-reflection layer 101 and a photoresist layer 110 thereon. The bottom anti-reflection layer 101 is an organic bottom anti-reflection layer 102 with a thickness of about 100 nm. The organic bottom anti-reflection layer 102 is provided with a silicon-containing bottom anti-reflection layer 103 with a thickness of about 50 nm. A silicon oxide layer 104 with a thickness of about 5 nm is also provided on the layer 103. The material forming the organic bottom anti-reflective layer 102 may be an organic anti-reflective material of ODL63 produced by Shin-Etsu Company of Japan. The material for forming the silicon-containing bottom anti-reflective layer 103 may be a silicon-containing anti-reflective material produced by Shin-Etsu Company under the brand name SHB A629.
[0025] The reason for forming the laminated bottom anti-reflective structure 101 w...
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