Separating and recycling device of multiple kinds of chemical liquid medicines

Abstract

The invention relates to a technology of recycling multiple kinds of chemical liquid medicines applied in the etching part during production process of semiconductor, specifically to a separating and recycling device of multiple kinds of chemical liquid medicines which is capable of separating multiple kinds of chemical liquid medicines and preparing the recycled chemical liquid medicine to recyclable concentration to be recycled; and the technology can greatly reduce the chemical liquid medicine waste during the etching process. The device is mainly provided with a liquid medicine cup, a rotating motor, a guide motor, a recycled liquid tank and a regenerative liquid tank; the guide motor is connected with a segment of pipeline, the upper end of the pipeline is communicated with the liquid medicine cup, and the lower end of the pipeline is rotated in different directions by the guide motor corresponding to the center of at least one collection cup opening at the lower side; the inlets of the recycled liquid tank and the regenerative liquid tank are connected with each other through the pipeline, a pipeline is inserted at the outlet of the regenerative liquid tank, and the other end of the pipeline is stretched to the upper side of the liquid medicine cup corresponding to a wafer. In the invention, the chemicals in different recycle container chemical liquid medicine tanks are recycled according to the developing solution through recycling and switching devices of different liquid medicines.

Description

technical field [0001] The invention is a technology applied to the recycling of various chemical liquids in the etching part of the semiconductor manufacturing process, and is specifically a device for separating and reusing various chemical liquids. Background technique [0002] The traditional wet etching represented by trench etching is difficult to control the etching accuracy, and the contamination of solvent particles leads to high defect levels, so it cannot be used for wafer processing with large diameter and small features. However, monolithic etching can avoid the contamination of solvent particles, but it will generate a large amount of chemical waste liquid, which is a blank in the recycling of chemicals. Contents of the invention [0003] In order to realize the reuse of chemicals, the object of the present invention is to provide a device for separating and reusing various chemical liquids, which can separate various chemical liquids, and then mix the recove...

AI Technical Summary

Problems solved by technology

[0002] The traditional wet etching represented by groove etching is difficult to control the etching accuracy, and the contamination of solvent particles leads to high defect levels, so it cannot be used for wafer processing with large diameter and small features

However, monolithic etching can avoid the contamination of solvent particles, but it will generate a large amount of chemical waste liquid, which is a blank in the recycling of chemicals.

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