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Film-coating workpiece carrying device and film-coating method

A technology for carrying devices and workpieces to be plated, applied in optical components, sputtering plating, ion implantation plating, etc., can solve problems such as distortion, large residual stress, deformation, etc., to reduce adhesion stress, avoid distortion, The effect of reducing the slight deformation

Inactive Publication Date: 2010-06-16
HONG FU JIN PRECISION IND (SHENZHEN) CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the heat dissipation performance of the coating workpiece carrying device used by the continuous sputtering machine to carry the workpiece to be coated is not good, resulting in damage such as distortion and deformation due to excessive temperature of the workpiece during coating
Moreover, the fixing method of the coating workpiece carrying device and the workpiece to be coated is not good, and a slight deformation occurs when the workpiece is coated, which may cause a large residual stress between the coating layer and the workpiece after the workpiece is cooled, affecting the adhesion of the coating

Method used

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  • Film-coating workpiece carrying device and film-coating method
  • Film-coating workpiece carrying device and film-coating method
  • Film-coating workpiece carrying device and film-coating method

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Embodiment Construction

[0013] The coated workpiece carrying device of the technical solution will be further described in detail below in conjunction with the accompanying drawings.

[0014] Please also refer to figure 1 and figure 2 , The coated workpiece supporting device 100 provided by the embodiment of the technical solution includes a chassis 10 , at least one cooling pipe 20 penetrating inside the chassis 10 , and a plurality of holders 30 . The cooling pipe 20 is fixed on the chassis 10 , and the holder 30 is arranged on the cooling pipe 20 , and the holder 30 is used to fix the workpiece to be coated so as to coat the workpiece to be coated.

[0015] The chassis 10 is a rectangular flat structure, and the chassis 10 has a first surface 12 , a second surface 14 , and a first side 16 and a second side 18 connected between the first surface 12 and the second surface 14 . The first surface 12 is parallel to the second surface 14 , wherein the first surface 12 is a bearing surface. The first...

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Abstract

The invention provides a film-coating workpiece carrying device which comprises a chassis, at least one cooing tube penetrating in the interior of the chassis and a plurality of fixing parts; the chassis comprises a carrying surface; the cooing tube comprises a plurality of bulge parts protruding on carrying surface; each fixing part is sheathed on the corresponding bulge part for fixe the workpiece to be coated; and the cooing tube is used for cooling fluid to flow to cool the workpiece to be coated. The invention also provides a method for coating film on the workpiece to be coated with theabove film-coating workpiece carrying device.

Description

technical field [0001] The invention relates to the technical field of coating, in particular to a coating workpiece carrying device and a coating method for sputtering coating. Background technique [0002] With the development of camera technology, lens modules are widely used in camera devices for various purposes, and the combination of lens modules with various portable electronic devices such as mobile phones and computers is favored by many consumers. [0003] A lens module generally includes a lens, a lens mount, a filter, an image sensor, and the like. For the design method of the lens, please refer to the paper Aspheric Lens Design published by Min-Kang Chao and Sheng-Wen Cheng at the IEEE Ultrasonics Symposium (2000 IEEE Ultrasonics Symposium). In order to reduce the degree of electromagnetic interference to the image sensor, it is generally necessary to coat a layer of anti-electromagnetic interference (EMI) coating on the surface of the mirror base. [0004] I...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/50C23C14/34C23C14/24G02B1/10
CPCC23C14/50
Inventor 王仲培
Owner HONG FU JIN PRECISION IND (SHENZHEN) CO LTD
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