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Production device and method of high purity trichlorosilane by using heat pump distillation

A high-purity trichlorosilane heat pump and production device technology, applied in the field of energy-saving separation of high-purity trichlorosilane, can solve the problems of serious pollution and high energy consumption

Active Publication Date: 2010-05-12
TIANJIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The improved Siemens method is currently the main production method of polysilicon in my country, which is compatible with the production of electronic-grade and solar-grade polysilicon, including trichlorosilane synthesis, trichlorosilane purification, trichlorosilane reduction, and dry distillation of reduced tail gas Basic processes such as recycling and hydrogenation of silicon tetrachloride mainly have problems such as high energy consumption and serious potential pollution

Method used

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  • Production device and method of high purity trichlorosilane by using heat pump distillation
  • Production device and method of high purity trichlorosilane by using heat pump distillation
  • Production device and method of high purity trichlorosilane by using heat pump distillation

Examples

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Embodiment 1

[0021] Take the purification of trichlorosilane in the production of 2000 tons / year polysilicon as an example. The production device includes a de-light tower, a de-weight tower and a heat pump device. The two towers are respectively equipped with a condenser and a reboiler. In the heat pump device, one end of the condenser is connected to the reboiler through a compressor through a pipeline, and the other end of the reboiler is It is connected to one end of the condenser through a pressure reducing valve. Among them, the pressure of the light removal tower is 300KPa, the temperature of the tower top is 60°C, and the reflux ratio is 20; the pressure of the weight removal tower is 600KPa, the temperature of the tower top is 80°C, and the reflux ratio is 3.

[0022]The annual running time is calculated at 8000h / year, the steam price is calculated at 150 yuan / ton, the electricity price is calculated at 0.5 yuan / Kwh, and the water price is calculated at 2.0 yuan / ton:

[0023] Aft...

Embodiment 2

[0026] Take the purification of trichlorosilane in the production of 1000 tons / year polysilicon as an example. The production device includes a de-light tower, a de-weight tower and a heat pump device. The two towers are respectively equipped with a condenser and a reboiler. In the heat pump device, one end of the condenser is connected to the reboiler through a compressor through a pipeline, and the other end of the reboiler is It is connected to one end of the condenser through a pressure reducing valve. Among them, the pressure of the light removal tower is 300KPa, the temperature at the top of the tower is 70°C, and the reflux ratio is 50; the pressure of the light removal tower is 600KPa, the temperature at the top of the tower is 90°C, and the reflux ratio is 10.

[0027] The annual running time is calculated at 8000h / year, the steam price is calculated at 150 yuan / ton, the electricity price is calculated at 0.5 yuan / Kwh, and the water price is calculated at 2.0 yuan / ton...

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Abstract

The invention relates to a production device and a method of high purity trichlorosilane by using heat pump distillation. Trichlorosilane raw materials enter a de-heavy fractionator to eliminate heavy components after light component elimination through a light component eliminating tower, thereby obtaining high purity trichlorosilane. On the basis, the light component eliminating tower and the de-heavy fractionator both adopt a heat pump distillation process. Cooling medium in a condenser absorbs heat after exchanging the heat with materials on the top of the tower and is evaporated into gas, the gas enters a reboiler as tower reactor heat source reactor liquid after pressure and temperature enhancement through compression, and the gas is condensed into liquid. The liquid returns to the condenser after reduction of expenditure and pressure so as to finish a cycle. Therefore, the heat at the low temperature part of the tower top is transferred to the high temperature part of a tower reactor through the cooling medium. The invention has the advantages that by adopting the heat pump distillation process, the energy consumption can be greatly lowered, and the annual economic benefit is greatly enhanced.

Description

technical field [0001] The invention relates to the technical field of energy-saving separation of high-purity trichlorosilane, in particular to a high-purity trichlorosilane heat pump rectification production device and method. Background technique [0002] Polysilicon is the basic raw material of solar energy industry and semiconductor industry, and is a strategic material necessary for the development of my country's electronic information industry and solar photovoltaic industry. [0003] The improved Siemens method is currently the main production method of polysilicon in my country, which is compatible with the production of electronic-grade and solar-grade polysilicon, including trichlorosilane synthesis, trichlorosilane purification, trichlorosilane reduction, and dry distillation of reduced tail gas Basic processes such as recycling and hydrogenation of silicon tetrachloride mainly have problems such as high energy consumption and serious potential pollution. In thi...

Claims

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Application Information

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IPC IPC(8): C01B33/107
CPCY02P20/129
Inventor 黄国强王红星李鑫钢张瑞玲张敏革
Owner TIANJIN UNIV
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